With the in-depth research of science and technology, the application of nano-level precision positioning in the low-temperature vacuum and high-magnetic environment is more and more applied in the fields of physics, chemistry and materials science, and the low-temperature vacuum non-magnetic piezo motion stage is a high-precision precision positioning equipment, which is mainly characterized by high precision, high stability and high reliability. It can provide precise positioning in low temperature, vacuum and magnetic field, and is widely used in semiconductor processing and detection.
XD106.XYZ60K
Characteristics
· 4K Low temperature, vacuum, non-magnetic, low temperature resistance up to 4K
· XYZ motion
· Travel range up to 30μm/axis @4K
· Resolution up to 2nm
· Open loop motion control
· Fast response speed
Applications
· Semiconductor inspection
· High precision testing and operation
· Other vacuum without magnetic requirements of nano-motion control
Technical Data
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CoreMorrow has designed and produced a variety of piezo controllers, such as modular controller, small controller, high power controller, industrial controller, integrated controller and so on. Suitable piezo controller can be selected according to different application scenarios.
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For more details please call 0451-86268790 or 17051647888 (Wechat ID) !