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Application of Piezo Nano Scanner in Femtosecond Laser Etch!

Update time：2023-12-25 14:21:41Clicks：1644second

What is Femtosecond Laser?

Femtosecond laser is the shortest pulse that can be obtained by humans in laboratory conditions, it is a laser that operates in the form of a pulse whose duration is very short, only a few femto seconds (English as femto second, short for fs, 1 femto second is one thousandth of one second), It is thousands of times shorter than the shortest pulse obtained by electronic methods. Femtosecond laser technology is an advanced processing technology that has developed rapidly in recent years, with extremely high processing accuracy and speed, and can be etched and processed on the surface of various materials at the micron to nanometer level.

Note: Picture from the network

Characteristics of Femtosecond Laser

1、Femtosecond laser is the shortest pulse we can get under experimental conditions, its accuracy is ±5 microns;

2、Femtosecond laser has a very high instantaneous power, which can reach 100 trillion watts, hundreds of times more than the world's total power generation;

3、Substances under the action of femtosecond laser will produce a very strange phenomenon, gaseous substances, liquid substances, solid substances will instantly become plasma;

4、Femtosecond laser has the characteristics of accurate targeting and focusing, which can focus on ultra-fine space regions smaller than the diameter of a hair;

5、With femtosecond laser surgery, there is no thermal effect and shock wave, there will be no tissue damage in the entire optical path.

Compared with traditional continuous laser and long pulse width nanosecond and picosecond laser, femtosecond laser processing materials have the following characteristics：

（1）High peak power, easy to cause material dissociation.

（2）The thermal effect is small, the processing precision is high, and it has unique advantages in the precision processing of materials.

（3）Wide range of applications.

Basics and Typical Application of Laser Etching

Basics

The basic principle of laser etching is to focus a high-energy laser beam (ultraviolet laser, fiber laser, femtosecond laser, etc.) on a very small spot, irradiate to the surface of the material being processed, and the energy of the laser beam is converted into heat energy, so that the material instantly evaporates, forming holes, slots and other processing effects.

Note: Picture from the network

Technical Features

Laser non-contact processing has the features of high flexibility, high speed, no noise, small heat affected area, and it can focus to laser wavelength level of very small spot, etc. Its dimensional accuracy in drilling, slicing, etching, cutting and processing quality, especially with some materials (such as polyimide) interaction which belongs to the "photochemical" "cold processing", can get "cold processing" without carbonization effect.

Typical Applications

1）Glass Materials Laser Etching

Laser etching has good reproducibility, high power, fast material removal speed, and no chemical corrosion pollution. ITO coating laser etching machine is a precision equipment that uses laser to etch ITO coating on the surface of ITO Glass and ITO Film. It can be used for high-precision and high-speed etching of various sizes on glass, PET, ITO, polycrystalline film and other oxide films, and can process a variety of specifications of electrodes. Electrode etching technology is especially suitable for mobile phone touch screen.

Note: Picture from the network

2）Solar Cell Laser Scribing

Reasonable structure, fast cutting speed, high precision, multiple function, stable and reliable performance, low failure rate, high pass rate of non-contact processing product, and wide application range.

Note: Picture from the network

CoreMorrow P12A Piezo Scanner Used for Femtosecond Laser Etching

By precisely controlling the laser energy, pulse width, scanning speed and other parameters, femtosecond laser etching can realize the precision machining and etching of metal, glass and other materials. Compared with traditional processing methods such as mechanical processing and chemical corrosion, femtosecond laser etching has higher processing accuracy and speed, and can realize the processing of finer patterns and more complex structures. At the same time, the laser processing is non-contact processing, by which the impact of mechanical stress on the material can be avoided,and reduce the possibility of damage and error.

The P12A series piezo scanner can be fixed with the platform in femtosecond laser etching application, to perform X, Z, XY, XZ, XYZ and other motions etch with loaded metal, glass and other materials under the action of control signals. The P12A series piezo scanner is equipped with high-resolution sensors. The position is detected in real time and fed back to the piezo controller, and then the controller adjusts the voltage to correct the displacement through PID algorithm, so as to realize the nanometer high precision positioning.

Technical Data

Model	P12A.XYZ100
Active axes	XYZ
Drive/Control	3 channels drive 3 channels sensor
Travel range（0~120V）	80μm/axis
Integrated sensor	SGS
Aperture	45×45mm^2
Closed/open-loop resolution	3nm/1nm
Closed-loop Linearity	0.15%F.S.
Closed-loop Repeatability	0.1%F.S.
Pitch/yaw/roll	<20μrad
Push/pull force	20N/4N
Stiffness	X0.3N/μm、Y0.25N/μm、Z0.2 N/μm
Unloaded resonant frequency	X200Hz/Y150Hz/Z120Hz
Closed/open-loop unloaded step time	30ms/0.8ms
Load capacity	0.5kg
El. capacitance	3.6μF/axis
Material	Steel, Aluminum
Mass	350g

Model	P12A.XYZ200
Active axes	XYZ
Drive/Control	3 channels drive 3 channels sensor
Travel range（0~120V）	160/axis
Travel range（0~150V）	200/axis
Integrated sensor	SGS
Closed/open-loop resolution	5.5nm/2nm
Closed-loop Linearity	0.5%F.S.
Closed-loop Repeatability	0.4%F.S.
Unloaded resonant frequency	X150Hz/Y130Hz/Z90Hz
Load capacity	0.3kg
El. capacitance	7.2μF/ axis
Material	Steel, Aluminum

Recommended Controller

E70 Piezo Controller

The E70 piezo controller is a three-channel piezo controller that can digitally communicate via serial port, USB or network port. The output voltage is 0~120V/150V, the output bandwidth is more than 10kHz, and it has a compact size which is very easy to integrate.

E00/E01 Piezo Controller

E00/E01 piezo controller is also a good choice to drive the P12A piezo scanner, and we have single channel, multi-channel, open loop, closed-loop models for your option. E00/E01 can be controlled by analog, digital and other ways, and also can be freely combined through modules to drive CoreMorrow and other import piezo products.

For more details, please call 0451-86268790 or 17051647888 (Wechat ID).

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Application of Piezo Nano Scanner in Femtosecond Laser Etch!

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