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P65.XY200Z50 High Precision Piezo Stage for Nano-metrology Application

Update time：2024-06-04 13:25:49Clicks：745second

Nano-metrology is a nanoscale high precision measurement technology, which mainly includes the measurement of size and displacement and the measurement of surface topography with nanoscale accuracy. With the rapid development of nanoscience, nanometrology is developing in the direction of high precision and high resolution, and instrument measurement equipment has achieved sub-nanometer or even higher measurement resolution in the range of tens of microns. It is widely used in aerospace, semiconductor, optics, medical treatment, biotechnology and other fields.

P65 Nanopositioning Stage Applied to Nano-metrology

P65.XY200Z50 piezo nano-positioning stage is drived by piezo actuators, combined with flexible hinge mechanism to realize XYZ motion. With high-performance piezoelectric ceramics built-in , the stage can achieve a maximum displacement of 200μm, closed-loop repeated positioning accuracy up to 0.006%F.S., resolution up to 0.6nm. It is small and very suitable for nano-metrology applications and positioning applications requiring high precision and resolution. It is shown in the following figure.

Characteristics

XYZ motion

Travel range: XY200μm/Z50μm

Load capacity to 500g

Open/closed loop

Optional vacuum version and custom specification

Applications

Nano-metrology/measurement, laser interferometry, nano-lithography, scanning microscopy, nano-positioning, nano-manipulation technology, etc.

Technical Data

型号	P65.XY200Z50S/K
Model	X、Y、Z
Nominal travel range （0~120V）	XY160μm、Z40μm
Travel range（0~150V）	XY200μm、Z50μm
Sensor	SGS/-
Resolution	XY3nm、Z2nm/ XY1nm、Z0.6nm
Closed-loop Linearity	XY0.015%F.S.、 Z0.007%F.S./-
Repeatability	XY0.017%F.S.、 Z0.006%F.S./-
Pitch/Yaw/Roll	＜10μrad
Unloaded resonant frequency	X260Hz/Y220Hz/Z280Hz
Resonant frequency@500g	150Hz
Closed/open loop unloaded Step time	100ms@500g/10ms
Load capacity	500g
El. capacitance	XY13.6μF/Z3.2μF
Material	Steel, Al
Mass(Cable included)	1.24kg

Supporting Controller

The piezo nanopositioning stage can be used with the E00.D12AL-V4 piezo controller for better performance. E00.D12AL-V4 is a case type piezo controller, it has 8 channels, the power supply voltage is AC220V, the bandwidth is 10kHz. It can be controlled by analog or digital signals, and also upper computer communication through RS-232, RS-422 serial port or USB serial port. Closed-loop servo control is also available. It can also drive other kinds of piezo products and bipolar piezo products, etc.

For more details, please contact CoreMorrow by calling 0451-86268790, 17051647888 (Wechat ID).

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P65.XY200Z50 High Precision Piezo Stage for Nano-metrology Application

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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Tel：0451-86268790

Piezo · Nano · Motion