During the wafer processing, MFC precisely controls the flow of various reactive gases, ensuring the stability of processes such as thin film deposition (CVD/PVD), etching, ion implantation, and cleaning. (The success or failure of a wafer worth tens of thousands RMB often depends on the precise control of gas flow).

In the production of lithium batteries, MFC controls the nitrogen purging flow to prevent moisture from entering the liquid injection workshop and ensure a dry atmosphere in the preparation process. In the production of hydrogen fuel cells, MFC precisely regulates the gas flow of the electrolytic water hydrogen production equipment and precisely controls the gas supply of the hydrogen fuel cell stack, optimizing the efficiency of electrochemical reactions.

In the basic experiments of laboratories and research institutes, MFC assists the laboratory gas mixer to achieve the dynamic mixing of multi-component gases. When conducting material research and development, for instance, in the preparation of nanomaterials such as graphene, MFC controls the flow of methane to regulate the growth rate, and so on.

As a "gas pulse regulator" for precision instruments such as gas chromatographs and mass spectrometers, MFC helps these devices control the precise gas flow rate, ensuring the accuracy of the analysis results.

(MFC achieves dynamic mixing of multi-component gases)

In environmental protection field, MFC is widely used in the measurement of air volume in air quality monitoring systems, the calibration of flow in particulate matter atmospheric samplers, and the flow control of gas analyzers and dynamic gas calibrators. They can effectively solve the problems of precise measurement and control of air volume in the process of atmospheric monitoring. For instance, MFC can monitor the concentration of VOCs during waste gas treatment and adjust the flow rate of the dilution gas to ensure the accuracy of online monitoring.

In the biotechnology industry based on life sciences, bioengineering, pharmaceuticals and medical equipment all require reliable and accurate instruments to maximize output and control processes. MFC can achieve repeatability and long-term stability, ensuring optimal gas measurement and control accuracy in R&D, bioreactors, fermenters, and medical applications. For example: During biological fermentation, MFC precisely controls the supply of oxygen and carbon dioxide during the microbial culture process, optimizing the growth efficiency of the bacteria. When mixing medical gases, MFC is responsible for adjusting the proportion of multiple gases in the anesthesia machine, ventilator and oxygen generator to ensure the safety and accuracy of inhalation concentration. During the process of microbial and cell culture, MFC controls the quantitative supply of various gases to maintain the pH value of the culture medium, etc.

Facing the extreme requirements of high-end manufacturing for the accuracy and response speed of MFC, traditional technologies have approached a bottleneck. Against this backdrop, piezoelectric ceramic technology has brought a revolutionary breakthrough to MFC.

H550C801WD1-A0LF is one of the many models of CoreMorrow metal-sealed piezo actuators. It has 55μm stroke and 800N blocking force. Its high-standard performance makes it highly suitable for driving fluid flow control valves, and perfectly meeting the requirements of fluid flow control valves for high reliability and high precision of driving components. We have other models and custom parameter available.