P22 series piezoelectric tilt stage is θx axis deflection piezoelectric deflection mirror/fast mirror. The flexible hinge guide design has zero friction and zero static resistance, excellent guide accuracy, provides submicron radian resolution and excellent positioning stability. Beam deflection range up to 6mrad, with extremely fast response speed (milliseconds to microseconds), very suitable for dynamic operation (such as tracking, scanning, drift and vibration elimination, etc.) and static positioning of optical and sample.
Features
• θx axis deflection
• Tilt angle up to 3mrad
• Sub-millisecond response time
• High closed loop positioning accuracy
Applications
• Image processing and stabilization
• Laser scanning
• Interlaced scanning
• Optical filter/switch
• Beam deflection
• Sample testing
Mounting and lens bonding
The lens loading surface of the P22 is a φ15mm plane. The lens is fixed to this surface by bonding. We can bond the lens for you for your subsequent use. You only need to install it after receiving the piezoelectric deflection mirror. , Ready to use.
P22.U3Shas two M3 mounting threaded holes at the bottom for fixing.
Structural principle and control
Moving plane of the P22.U3S is supported by hinge and pushed by linear piezoelectric actuator. The hinge determines the pivot point and also acts as a pretension for the piezoelectric actuator. The advantages of a single hinge and single actuator design are simple structure, small size, and high cost performance. If the temperature of the working environment varies greatly during angular deflection, it is recommended to use core-driven differential piezoelectric tilt stage.
A piezoelectric controller with one output channel can drive the P22.U3S piezoelectric tilt stage. The optional E53.D piezoelectric controller is small in size and full-featured. It has closed-loop servo control function and can be passed through an external analog signal or computer. Controlled by the software, it is easy to operate and easy to integrate.
Technical data
Model: P22.U3S
Active axis: θx
Tilt angle(0~120V): 2.5mrad(≈ 520”)
Tilt angle(0~150V):3mrad(≈ 600”)
Sensor: SGS
Closed/open loop resolution: 0.3/0.1μrad
Closed loop linearity: 0.2%F.S.
Cloased loop repeatability: 0.15%F.S.
Unload resonant frequency: 3kHz
Closed/open loop unload step time: 3/0.8ms
Unload frequency(10% travel): 100Hz
Unload frquency(100% travel): 40Hz
Capantiance: 1.8μF
Material: Steel
Mass: 80g