Piezoelectric controller equipped with capacitive displacement measurement verification is so called because it is essentially a piezoelectric controller, but unlike the usual piezoelectric controller, it is additionally equipped with a capacitive displacement measurement module. It can be used to measure the displacement of micro-motion products, the measuring range is generally 0~200μm. The function and usage of the piezoelectric controller are as follows.
Function 1: Used to verify displacement of closed-loop piezo nanopositioning system
Closed-loop piezoelectric nanopositioning system is piezoelectric nano-motion positioning system that can perform displacement closed-loop servo control. It can feedback and control the movement displacement of the piezoelectric actuator in real time. In this system, the piezoelectric controller is closed-loop piezoelectric controller, which is composed of power amplifier module, closed-loop servo module, and power supply module. The upper computer control module is optional.
After the closed-loop piezoelectric controller is equipped with capacitive displacement measurement module, it can measure the displacement of the piezoelectric nanopositioning system itself. The process is shown in the figure below.
Function 2: Used to verify displacement of open-loop piezoelectric nanopositioning system
Open-loop piezoelectric nano-positioning system is piezoelectric nano-motion positioning system that can perform basic motion control. It can control the movement displacement of the piezoelectric actuator. In this system, the piezoelectric controller is on closed loop piezoelectric controller, it is composed of power amplifier module, power supply module, and optional upper computer control module.
After open-loop piezoelectric controller is equipped with capacitive displacement measurement module, it can measure the displacement of the piezoelectric nanopositioning system itself. The process is shown in the figure below.
Function 3: Used as closed-loop control of the piezoelectric nano positioning system
Equipped with the capacitive displacement measurement module in the open-loop piezoelectric nanopositioning system, it can be used as the servo control of the piezoelectric controller, so that the entire system forms closed-loop control. In addition, the piezoelectric controller integrated with the capacitive displacement measurement module can also measure the displacement of the piezoelectric nanopositioning system itself, just like "Function 2". The two processes are shown in the figure below.
Function 4: Measure the displacement of other equipment
If you are using other piezoelectric motion equipment, the displacement range is in the range of 0~200μm, you can also use this capacitive piezoelectric controller for measurement.