Vacuum Multi-Axes Piezo Motor
In today's rapid development of science and technology, the precision motion control field continues to usher in innovative breakthroughs. As the main force of precision motion, piezoelectric products are gradually emerging in many fields with their unique working principle and excellent performance.
F21.N2E is a 2-axis motion piezo motor capable of linear X and θx tilt motion. The X-axis linear running range is 10mm with 5nm resolution, the max. speed is 3mm/s with 0.1μm repeatability. θx tilt range is 10° with 1μrad resolution, speed is 3°/s, with 0.001° repeatability. It can load 600g samples in motion. It has a compact structure and small size, which makes it suitable for various high-precision applications.
Characteristics
Large travel range
Fast response speed
High closed-loop resolution
Vacuum compatible
Application
Semiconductors: Scanning electron microscopy (SEM) sample manipulation, atomic force microscopy, large range electron beam Direct writing (EBL), lithography machines, wafer processing and inspection, probe stations, etc.
Note: Image from online resourcesOptics: Laser communication, laser processing, astronomical telescope, optical path adjustment, laser stabilization, fiber alignment, optical test system, etc.
Note: Image from online resources
Biological and medical: Super-resolution imaging sample movement, micro and nano CT, cell penetration, microdosing, etc.
Note: Image from online resources
CoreMorrow Multi-Axes Piezo Motor
Technical Data
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Model |
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Active axes |
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Sensor |
Grating sensor |
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Active axes |
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Max. speed |
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Travel range |
10° or ±5° |
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Resolution |
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Linearity |
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Repeatability |
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Linear motion |
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Active axes |
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Max. speed |
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Travel range |
10mm or ±5mm |
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Resolution |
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Linearity |
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Repeatability |
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Integral |
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Load capacity |
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Working temperature range |
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Mass |
200g(not including connector and cable) |
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Material |
Steel, Al |
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Cable length |
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Connector |
DB15 male ×2 |
Recommended Controller
CoreMorrow E53.D1E-J piezo controller is suitable for driving F21.N2E piezo motor. It is a single-channel piezo controller, using digital control, 24VDC power supply, and static power consumption is less than 5W. Communication interface is TYPE-C, RS-422, RS-232, for customers easy operation. It has a small size of 105×103×30.1mm^3, very compact and easy to integrate.
For more details, please calling 0451-86268790, 17051647888(Wechat ID).
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
