- Introduction
- Feedback
P13.Z30 is Z moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 48μm/axis. Open loop or closed loop version is available.
Characteristics
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Applications
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Type |
S-Closed loop
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P13.Z40S
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P13.Z40K |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
38.5 |
38.5 |
μm±10% |
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Max.travel range(0~150V) |
48 |
48 |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
1.6 |
1 |
nm |
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Linearity |
0.08 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
%F.S. |
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Pitch/yaw/roll |
＜50 |
＜50 |
μrad |
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Push/pull force capacity |
10/3 |
10/3 |
N |
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Stiffness |
0.5 |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
1 |
1 |
kHz±20% |
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Resonant frequency@100g |
0.325 |
0.325 |
kHz±20% |
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Step time |
20@100g |
6 |
ms±20% |
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Load capacity |
Horizontal |
0.1 |
0.1 |
kg |
| Vertical | 0.05 | 0.05 | ||
| Inverted | 0.05 | 0.05 | ||
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Operating temperature |
-20~65 |
-20~65 |
℃ | |
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El. capacitance |
0.4 |
0.4 |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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| Cable length | 2 | 2 |
m±10mm |
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Mass |
34(with no cable) |
34(with no cable) |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
