Characteristics

Closed-loop version for high accuracy	Anti-vibration design	Differential drive	Fast response
High/low-temperature

Step time

Technical Data
Type		P60.X250S	P60.X250K	Units
Active axes		X	X
Drive control		2 driving channels 1 sensing channel	2 driving channels
Driving channels		2	2
Travel range(0~100V)		±130	±130	μm±10%
Travel range(0~120V)		±165	±165	μm±10%
Sensor		SGS	-
Resolution		9	3	nm
Linearity		0.1	-	%F.S.
Repeatability		0.04	-	%F.S.
Pitch/yaw/roll		<10	<10	μrad
Push/pull force		300/30	300/30	N
Stiffness		1.2	1.2	N/μm±20%
Unloaded resonant frequency		490	490	Hz±20%
Unloaded step time		80	40	ms±20%
Load capacity		0.6	0.6	kg
El. capacitance		24.6	24.6	μF±20%
Operating temperature		-40~+80	-40~+80	℃
Anti-vibration design	Half sine wave	15g， 11ms	15g， 11ms
Anti-vibration design	Back peak sawtooth wave	20g， 11ms	20g， 11ms
Material		Steel, Aluminum	Steel, Aluminum
Mass		950	950	g±5%

Drawings（Click on the picture to enlarge it）

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