- Introduction
- Feedback
Piezo nanopositioning stage plays an important role in the field of precision positioning. It can be integrated into all kinds of high precision equipment to provide nanoscale motion control, and is widely used.
The XD770.300 series piezo stage moves in Z, can reach 300μm travel, and the load capacity can reach 5kg. It can realize the double improvement of the travel range and load capacity, providing a high-quality solution for the applications that need of large travel and large load at the same time. With CoreMorrow’s piezo controller, high resolution, fast response.
Characteristics
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Applications
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| Technical Data | |||
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Type |
XD770.300S |
XD770.300S |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel， |
1 driving channel |
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Nominal travel range（0~120V) |
240 |
240 |
μm±10% |
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Travel range（0~150V） |
300 |
300 |
μm±10% |
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Sensor |
SGS |
- |
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Resolution |
10 |
3 |
nm |
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Linearity |
0.08 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
%F.S. |
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Pitch/yaw/roll |
＜ 15 |
＜ 15 |
μrad |
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Unloaded resonant frequency |
380 |
380 |
μF±20% |
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Resonant frequency |
110@5kg |
110@5kg |
Hz±20% |
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Unloaded step time |
300/10 |
300/10 |
ms±20% |
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Load capacity |
5 |
5 |
kg±5% |
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El. capacitance |
40.8 |
40.8 |
μF±20% |
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Operating temperature |
-20~80 |
-20~80 |
℃ |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass（no cable) |
1 |
1 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
