Characteristics

Open/closed loop

UHV version is available

Optional 60μm displacement

Load to 4kg

Technical Data
Type	S-Closed loop K-Open loop	P66.XY60S P66.XY60K	Units
Active axes		X、Y
Drive control		2 driving channels 2 sensing channels
Travel range(0~120V)		48/axis	μm±10%
Travel range(0~150V)		60/axis	μm±10%
Sensor		SGS/-
Closed/open loop resolution		2/0.5	nm
Closed-loop linearity		0.15/-	%F.S.
Repeatability		0.1/-	%F.S.
Pitch/yaw/roll		<20	μrad
Push/pull force capacity		120/12	N
Stiffness in motion direction		2.1	N/μm±20%
Unloaded resonant frequency		X0.9/Y1.2	kHz±20%
Closed/open-loop unloaded step time		20/1.6	ms±20%
Closed-loop operating frequency（-3dB）		-	Hz±20%
Load capacity		4	kg
El. capacitance		7.2/axis	μF±20%
Material		Aluminum
Mass		450	g±5%

Drawings（Click on the picture to enlarge it）

3D diagram presentation

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