- Introduction
- Feedback
P18 1~3 axes piezo linear scanner adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize highspeed scanning up to 300μm. The aperture is Ø35mm, and various displacements and specifications are available for selection. It is suitable for long-travel multi-dimensional scanning applications.
Characteristics
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Appearance 
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Direct-driving 
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High Positioning Accuracy CoreMorrow P18.XY300 featuring large displacement, high precision and high stability is applied to nanolithography experiments . 
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Applications
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| Technical Data | ||||
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Type |
S-Closed loop |
P18.XZ200S |
P18.XZ200K |
Units |
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K-Open loop |
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Active axes |
Z |
Z |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Travel range(0~120V) |
160/axis |
160/axis |
µm±10% |
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Travel range(0~150V) |
200/axis |
200/axis |
µm±10% |
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Sensor |
SGS |
- |
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Aperture |
Ø35 |
Ø35 |
mm |
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Closed/open loop resolution |
7 |
2 |
nm，typ. |
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Closed-loop linearity |
0.2 |
- |
%F.S. |
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Repeatability |
0.15 |
- |
%F.S. |
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Pitch/yaw/roll |
<20 |
<20 |
µrad |
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Push/pull force |
30/10 |
30/10 |
N |
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Stiffness |
0.3 |
0.3 |
N/µm±20% |
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Unloaded resonant frequency |
X200/Z300 |
X200/Z300 |
Hz±20% |
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Closed/open-loop unloaded step time |
50 |
5 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
- |
- |
Hz±20% |
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Load capacity |
1 |
1 |
Kg |
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El. capacitance |
11/axis |
11/axis |
μF±20% |
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Material |
Aluminum |
Aluminum |
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Mass |
550 |
550 |
g±5% |
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Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation.
Technical data is measured by CoreMorrow E00/E01 series piezo controller.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
