- Introduction
- Feedback
P11.XY200 is a small-volume 2 axis piezo nanopositioning stage, its travel range can reach 200μm, and a closed-loop feedback sensor can be selected to obtain higher precision. Custom low temperature vacuum versions are available.
Characteristics
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Typical Application
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Type |
P11.XY200S |
P11.XY200K |
Units |
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Active axes |
X、Y |
X、Y |
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Drive control |
2 driving channels 2 sensing channels | 2 driving channels |
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Travel range(0~120V) |
160/axis |
160/axis |
μm±20% |
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Travel range(0~150V)） |
200/axis |
200/axis |
μm±20% |
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Sensor |
SGS |
- |
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Closed/open loop resolution |
10 |
5 |
nm |
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Linearity |
0.05 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
%F.S. |
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Unloaded resonant frequency |
100 |
100 |
Hz±20% |
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Closed/open-loop unloaded step time |
- |
- |
ms±20% |
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Load capacity |
0.3 |
0.3 |
kg |
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El. capacitance |
3.6 |
3.6 |
μF±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
- |
- |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
