P63 Piezo Nanopositioning Stage Current Location：Product Homepage >> XYZ Piezo Nanopositioner>>P63 Piezo Nanopositioning Stage
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Characteristics


 1~3 axes

 XY stroke to 18μm/axis

 Z stroke to 8μm

 Open/closed loop

 Load to 0.5kg

    Technical data

Models

S-clsoed loop

K-open loop

P63.X18S
P63.X18K

P63.Z8S
P63.Z8K

P63.XY18S
P63.XY18K

P63.X18Z8S
P63.X18Z8K

P63.XY18Z8S
P63.XY18Z8K

Units

Active axes

X

Z

XY

XZ

XYZ

 

Drive control

1 driving channel 1 sensing channel

1 driving channel 1 sensing channel

2 driving channels 2 sensing channels

2 driving channels 2 sensing channels

3 driving channels 3 sensing channels

 

Travel range(0~120V)

16

6

16/axis

X16, Z6

XY16, Z6

μm±10%

Max.travel range(0~150V)

18

8

18/axis

X18, Z8

XY18, Z8

μm±10%

Integrated sensor

SGS/-

SGS/-

SGS/-

SGS/-

SGS/-

 

Closed/open loop resolution

0.6/0.2

0.2/0.1

0.6/0.2

X0.6/0.2、Z0.2/0.1

XY0.6/0.2、Z0.2/0.1

nm

Closed-loop linearity

0.3/-

1/-

0.3/- 

X0.3, Z1/-

XY0.3, Z1/-

%F.S.

Repeatability

0.25/-

0.25/-

0.25/-

0.25/-

0.25/-

%F.S.

Pitch/Yaw/Roll

≤15

≤15

≤15

≤15

≤15

µrad

Unloaded resonant frequency

2

1

2

X2/Z1

X2/Y2/Z1

kHz±20%

Closed/open-loop unloaded Step time

8/0.5

8/0.5

8/0.5

8/0.5

8/0.5

ms±20%

Load capacity

Horizontal

0.5

0.5

0.5

0.5

0.5

kg

Vertical
 0.1 0.05 0.1 0.05 0.05
Inverted
 0.5 0.1 0.5 0.1 0.1

Electrical capacitance

1.8

0.8

1.8

X1.8, Z0.8

XY1.8, Z0.8

μF±20%

Operating temperature

-20~80

-20~80

-20~80

-20~80

-20~80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

 

Cable length

1.5

1.5

1.5

1.5

1.5

m±10mm

Mass

-

112

-

-

235

g±5%

Auto CAD PDF


Step


 Specs sheet downloads

P63.X18

P63.Z8

P63.XY18

P63.X18Z8

P63.XY18Z8


 Manual

P63.X18

P63.Z8

P63.XY18

P63.X18Z8

P63.XY18Z8


Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.


Mounting Method Horizontal Mounting
 Vertical Mounting
 Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings（Click on the picture to enlarge it）

     3D diagram presentation
     3D diagram presentation
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