P93 could realize max stroke to 81μm. It could be equipped with LVDT sensor or CAP sensor. The sensor outputs 0-10V voltage signal corresponding to the 0μm to full stroke of the stage.
Characteristics
Ultra high precision |
Large load capacity |
Quick response time |
High stiffness |
Travel range to 81µm |
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Dust and Droplet Proof On Request
Fast tool stage is dust- and drip-resistant, allowing it to work in humid environments. The stage body material is made of stainless steel to ensure the stability during processing, the structure is stable and reliable, and the machining accuracy is not affected by the vibration. |
Large Blocking Force Blocking force of piezo actuator in fast tool positioning stage is several times of other piezo actuator in piezo stage. |
Closed loop Resolution Unlike vibration machining, the tool position could be feedback controlled by sensor for nanometer resolution. |
Customized Macro Micro Stage |
Freqency VS Load Curve |
Applications
Diamond bit feed |
Precision processin |
High speed tool control |
Precision machining and grinding |
Technical data | |||||
Models |
C/L-Closed loop |
P93.X70C |
P93.X70L |
P93.X70K |
Units |
K-Open loop |
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Active axes |
X |
X |
X |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel |
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Motion and Positioning |
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Travel range(0~120V) |
65 |
65 |
65 |
µm±10% |
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Travel range(0~150V) |
81 |
81 |
81 |
µm±10% |
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Integrated sensor |
CAP |
LVDT |
- |
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Resolution |
2.5 |
10 |
1 |
nm,typ. |
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Closed-loop linearity |
0.05 |
0.1 |
- |
%F.S. |
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Repeatability |
0.03 |
0.05 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<15 |
<15 |
<15 |
µrad |
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Mechanical properties |
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Push/pull force capacity in motion direction |
400/50 |
400/50 |
400/50 |
N |
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Stiffness in motion direction |
5 |
5 |
5 |
N/µm±20% |
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Unloaded resonant frequency |
0.15 |
0.15 |
0.15 |
kHz±20% |
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Unloaded step time |
10 |
10 |
7 |
ms±20% |
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Load capacity |
20 |
20 |
20 |
Kg |
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Drive properties |
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Electrical capacitance |
15 |
15 |
15 |
μF±20% |
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Miscellaneous |
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Material |
Steel |
Steel |
Steel |
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Dimensions(L×W×H) |
145.5×60×60 |
145.5×60×60 |
145.5×60×60 |
mm |
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Mass |
4000 |
4000 |
4000 |
g±5% |
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Cable length |
1.5 |
1.5 |
1.5 |
m±10mm |
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Sensor/voltage connection*** |
LEMO |
LEMO |
LEMO |
** Custom ultralow temperature and ultrahigh vacuum versions are available.
***Custom connector is available.
Note: The parallelism of the moving platform is about 20 μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.
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