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The S23A is a large-load piezo Z/tip/tilt platform for θx, θy deflection and Z-axis linear motion, capable of carrying a large φ130mm lens (weight up to 680g) to achieve high-precision motion. Its deflection range can reach 0.17mrad and the linear travel can reach 9.4μm. It is internally connected in parallel by three sets of piezo actuators, and can realize θx, θy deflection and Z-axis linear motion using the corresponding CoreMorrow three-channel piezo controller.
Characteristics
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Applications
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| Technical Data | |||
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Type |
S23A.ZT0S-A
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S23A.ZT0K-A
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Units |
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Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
3 driving channels |
3 driving channels |
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Nominal tilt angle(0~120V) |
±0.06（≈±12''）/±0.07（≈±14.5''） |
±0.06（≈±12''）/±0.07（≈±14.5''） |
mrad±10% |
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Max.tilt angle(0~150V) |
±0.075（≈±15.5''）/±0.085（≈±17.5''） |
±0.075（≈±15.5''）/±0.085（≈±17.5''） |
mrad±10% |
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Nominal linear travel range(0~120V) |
7.5 | 7.5 |
μm±10% |
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Max.linear travel range(0~150V) |
9.4 | 9.4 |
μm±10% |
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Closed/open-loop resolution in θx, θy |
6（＜0.01''） |
2（＜0.01''） |
nrad |
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Closed/open-loop resolution in Z |
0.3 | 0.1 | nm |
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Sensor type |
SGS |
- |
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| Linearity |
θx0.15/θy0.13/Z0.25 |
- |
%F.S. |
| Repeatability |
θx0.22/θy0.14/Z0.25 |
- |
%F.S. |
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Unloaded resonant frequency |
325/800/600 |
325/800/600 |
Hz±20% |
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Loaded resonant frequency@680g
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275/585/425 |
275/585/425 |
Hz±20% |
| Step time |
20/full stroke，@680g |
8 |
ms±20% |
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El. Capacitance |
1.6/ axis |
1.6/ axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass(including wires and connectors) |
2.5 |
2.5 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
