- Introduction
- Feedback
S54.T0 is a customized piezo tip/tilt stage that tilts in θx, θy. It adopts a frictionless flexible hinge structure design with fast response speed and high closed-loop positioning accuracy. It is compact and features a large center through-hole, makes it easy to integrate into the systems of microscopy and scanning optical system.
Characteristics
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Application
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Type |
S-closed loop K-open loop |
S54.T0S |
S54.T0K |
Units |
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Active axes |
θx，θy |
θx，θy |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
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Norminal tilt angle(0~120V) |
±0.4(≈±83″) |
±0.4(≈±83″) |
mrad±10% |
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Tilt angle(0~150V) |
±0.5(≈±103″) |
±0.5(≈±103″) |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Tilt resolution |
0.04(＜0.01″) |
0.015(＜0.01″) |
μrad |
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Linearity |
θx0.06/θy0.05 |
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%F.S. |
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Repeatability |
θx0.04/θy0.03 |
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%F.S. |
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Unloaded resonant frequency |
θx0.7/θy0.6 |
θx0.7/θy0.6 |
kHz±20% |
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Loaded resonant frequency@100g |
θx0.3/θy0.4 |
θx0.3/θy0.4 |
kHz±20% |
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Unloaded step time |
12 |
1 |
ms±20% |
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Load capacity |
0.1 |
0.1 |
kg |
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El. capacitance |
1.6/axis |
1.6/axis |
μF±20% |
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Material |
Al, Steel |
Al, Steel |
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Mass |
330(with cable) |
330(with cable) |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
