- Introduction
- Feedback
S54.T0S/K-C piezo tip/tilt stage tilts in θx, θy. It adopts a frictionless flexible hinge structure design with fast response speed and high closed-loop positioning accuracy. Its load capacity is to 8kg, which is designed for suitable for large load tilt application. With a 200mm×200mm through hole in the center, it can be used for transmitted light applications.
Characteristics
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Type |
S-Closed loop |
S54.T0S-C |
S54.T0K-C |
Units |
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Active axes |
θx, θy |
θx, θy |
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Drive control |
3 driving channels, 2 sensing channels |
3 driving channels |
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Nominal tilt angle(0~120V) |
±0.28(≈±58″) |
±0.28(≈±58″) |
mrad±10% |
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Tilt angle(0~150V) |
±0.35(≈±72″) |
±0.35(≈±72″) |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Resolution |
0.7(≈0.14″) |
0.1(≈0.02″) |
μrad |
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Linearity |
0.05 |
- |
%F.S. |
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Repeatability |
0.03 |
- |
%F.S. |
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Unloaded resonant frequency |
400 |
400 |
Hz±20% |
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Resonant frequency@8kg |
180 |
180 |
Hz±20% |
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Step time |
50@8kg |
4 |
ms±20% |
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Load capacity |
8 |
8 |
kg |
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El.capacitance |
14.5/axis |
14.5/axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass(Cable included) |
3.75 |
3.75 |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
