S22.U0S/K-A1W non-magnetic Piezo Tilt StageCurrent Location:Product Homepage >> Piezo Z/Tip/Tilt Stages>>S22.U0S/K-A1W non-magnetic Piezo Tilt Stage
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   S22.U0S/K-A1W is a one-dimensional non-magnetic piezo tilt stage that performs deflection in θx and can achieve a displacement of 0.5mrad. Its load capacity can reach up to 500g. To ensure non-magnetism, its internal structure and materials have undergone special treatment.




Characteristics


 Tilt in θx

 Tilt angle up to 0.5mrad

 Resolution up to 0.005μrad

 Load capacity up to 500g

 Non-magnetic


 

 

   Technical Data

Type

S-Closed loop

S22.U0S-A

S22.U0K-A

Units

K-Open loop

 Active axes

θx

θx

 

 Drive control

2 driving channels
1 sensing channel

2 driving channels

 Nominal tilt angle(0~120V)

±0.2(≈±41'')

±0.2(≈±41'')

mrad±10%

 Max. tilt angle(0~150V)

±0.25(≈±52'')

±0.25(≈±52'')

mrad±10%

 Integrated sensor

SGS

-

 

 Resolution

0.013(<0.01'')

0.005(<0.01'')

µrad

 Linearity

0.104

-

%F.S.

 Repeatability

0.023

-

%F.S.

 Unloaded resonant frequency

1800

1800

Hz±20%

 Closed-loop operating frequency (-3dB)

100@400g

-

Hz±10%

 Step time

5@400g、20μrad

2

ms±20%

 El.capacitance

14

14

μF±20%

 Load capacity 500 500 g

 Material

Ti, Aluminum

Ti, Aluminum

 

 Mass (not include cable) 

590

590

g±5%

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