Characteristics
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Technical Data | ||||
Type |
S-Closed loop |
S22.U0S-A |
S22.U0K-A |
Units |
K-Open loop |
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Active axes |
θx |
θx |
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Drive control |
2 driving channels 1 sensing channel |
2 driving channels |
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Nominal tilt angle(0~120V) |
±0.2(≈±41'') |
±0.2(≈±41'') |
mrad±10% |
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Max. tilt angle(0~150V) |
±0.25(≈±52'') |
±0.25(≈±52'') |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Resolution |
0.013(<0.01'') |
0.005(<0.01'') |
µrad |
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Linearity |
0.104 |
- |
%F.S. |
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Repeatability |
0.023 |
- |
%F.S. |
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Unloaded resonant frequency |
1800 |
1800 |
Hz±20% |
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Closed-loop operating frequency (-3dB) |
100@400g |
- |
Hz±10% |
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Step time |
5@400g、20μrad |
2 |
ms±20% |
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El.capacitance |
14 |
14 |
μF±20% |
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Load capacity | 500 | 500 | g | |
Material |
Ti, Aluminum |
Ti, Aluminum |
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Mass (not include cable) |
590 |
590 |
g±5% |
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