- Introduction
- Feedback
S51.ZT0S/K-B1 Piezo Z/Tip/Tilt Platform is one customized piezo stage that tilts in θx, θy and moves in Z. There is a large aperture in its center that is suitable for lighttransmitted applications.
Characteristics
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θx θy tilt and Z motionApplications
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| Technical Data | |||
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Types |
S51.ZT0S-B1 |
S51.ZT0K-B1 |
Units |
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Active axes |
θx θy Z |
θx θy Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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Nominal travel in Z(0 ~120V) |
90 |
90 |
mrad±10% |
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Travel in Z(0 ~150V) |
110 |
110 |
mrad±10% |
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Nominal travel in θx θy(0~120V) |
±0.32/axis |
±0.32/axis |
mrad±10% |
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Travel in θx θy(0~150V) |
±0.4/axis |
±0.4/axis |
mrad±10% |
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Sensor type |
SGS |
- |
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Resolution in Z |
10 |
3 |
nm |
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Resolution in θx θy |
0.25 |
0.1 |
μrad |
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Closed-loop linearity |
0.05 |
- |
%F.S. |
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Closed-loop repeatability |
0.03 |
- |
%F.S. |
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Blocking force in Z |
500 |
500 |
N |
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Stiffness in Z |
8 |
8 |
N/μm |
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Unloaded resonant frequency |
230 |
230 |
Hz±20% |
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Resonant frequency@3kg |
150 |
150 |
Hz±20% |
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Step Time |
40@3kg |
10 |
ms±20% |
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Load capacity |
5 |
5 |
kg |
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El.capacitance |
7.2/axis |
7.2/axis |
μF±20% |
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Material |
Al, Steel |
Al, Steel |
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Mass |
5 (Cable not included) |
5 (Cable not included) |
kg |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
