- Introduction
- Feedback
H64A.XYZTR2S/K-C is a piezo nanopositioning platform that can generate ultra precision motion in six axes, suitable for positioning and attitude adjustment. It adopts a parallel mechanism design internally, which can achieve better dynamic performance. It is equipped with high-performance piezos, which can achieve linear displacement of ±9μm in X, ±9.5μm in Y, 155μm in Z and deflection angle of ±1.1mrad in θx,θy, ±1mrad in θz. The closed-loop version of the full bridge design avoids temperature drift significantly and ensures nanometer positioning accuracy.
Characteristics
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 Parallel mechanism, better dynamics
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Recommended Controller 
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| Technical Data | |||
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Type |
H64A.XYZTR2S-C |
H64A.XYZTR2K-C |
Units |
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Active axes |
X、Y、Z、θx、θy、θz |
X、Y、Z、θx、θy、θz |
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Drive control |
6 driving channels |
6 driving channels |
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XYZ nominal travel range(0~120V) |
X±7/Y±7.5/Z125 |
X±7/Y±7.5/Z125 |
μm±10% |
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XYZ travel range(0~150V) |
X±9/Y±9.5/Z155 |
X±9/Y±9.5/Z155 |
μm±10% |
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θxθyθz nominal travel range(0~120V) |
θxθy±0.9（≈±186秒）/ θz±0.8（≈±165秒） |
θxθy±0.9（≈±186秒）/ θz±0.8（≈±165秒） |
mrad±10% |
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θxθyθz travel range(0~150V) |
θxθy±1.1（≈±227秒）/ θz±1（≈±206秒） |
θxθy±1.1（≈±227秒）/ θz±1（≈±206秒） |
mrad±10% |
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Integrated sensor |
SGS |
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XYZ resolution |
X0.56/Y0.61/Z5 |
XY0.2/Z1.5 |
nm |
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θxθyθz resolution |
θxθy0.08/θz0.07（≈0.015秒） |
0.025（＜0.01秒） |
μrad |
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Linearity |
XZ0.05/Y0.12/θx0.04/θy0.02/θz0.03 |
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%F.S. |
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Repeatability |
XY0.04/Z0.02/θxθyθz0.02 |
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%F.S. |
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Unloaded resonant frequency |
X562/Y630/Z338/θz380 |
X562/Y630/Z338/θz380 |
Hz±20% |
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Loaded resonant frequency@10kg |
X220/Y210/Z109/θz112 |
X220/Y210/Z109/θz112 |
Hz±20% |
| Load capacity | 12 | 12 | kg |
| El. Capacitance |
XY7.2/θxθyZ21.6/θz50 |
XY7.2/θxθyZ21.6/θz50 |
μF±20% |
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Closed-Loop Step Time |
40@1Hz，1/10 travel |
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ms±20% |
| Material |
Steel, Al |
Steel, Al |
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Mass(Not include cable) |
6.45 |
6.45 |
kg±5% |
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Connector |
DB15 male + DB15 female |
DB15 male + DB15 female |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
