- Introduction
- Feedback
H63.XYZTR2S/K is a piezo nanopositioning platform that can generate ultra precision motion in six axes, suitable for positioning and attitude adjustment. It is equipped with high-performance piezos, which can achieve linear displacement of 36μm/axis in XYZ and deflection angle of 2mrad in θx,θy, 2.5mrad in θz. The closed-loop version of the full bridge design avoids temperature drift significantly and ensures nanometer positioning accuracy.
Characteristics
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 Closed-loop version for high positioning accuracy
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| Technical Data | |||
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Type |
H63.XYZTR2S |
H63.XYZTR2K |
Units |
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Active axes |
X、Y、Z、θx、θy、θz |
X、Y、Z、θx、θy、θz |
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Drive control |
7 driving channels
6 sensing channels
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7 driving channels |
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XYZ nominal travel range(0~120V) |
24/axis |
24/axis |
μm±10% |
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XYZ travel range(0~150V) |
30/axis |
30/axis |
μm±10% |
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θxθyθz nominal travel range(0~120V) |
θxθy1.6（≈330''）/ θz2（≈412''） |
θxθy1.6（≈330''）/ θz2（≈412''） |
mrad±10% |
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θxθyθz travel range(0~150V) |
θxθy2（≈412''）/ θz2.5（≈516''） |
θxθy2（≈412''）/ θz2.5（≈516''） |
mrad±10% |
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Integrated sensor |
SGS |
- |
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XYZ resolution |
1 |
1 |
nm |
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θxθyθz resolution |
0.1（≈0.02''） |
0.1（≈0.02''） |
μrad |
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Linearity |
XY0.07/Z0.19/
θx0.07/θyθz0.1
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- |
%F.S. |
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Repeatability |
X0.02/Y0.03/Z0.09/
θx0.05/θy0.04/θz0.03
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- |
%F.S. |
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Unloaded resonant frequency |
X465/Y295/Z445/
θx230/θy305/θz230
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X465/Y295/Z445/
θx230/θy305/θz230
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Hz±20% |
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Loaded resonant frequency@5kg |
X161/Y115/Z107/
θx22/θy24/θz45
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X161/Y115/Z107/
θx22/θy24/θz45
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Hz±20% |
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Load capacity |
5 |
5 |
kg |
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El. Capacitance |
X7.2/Y7.5/Z31.2/
θxθy1.1/θz17.7
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X7.2/Y7.5/Z31.2/
θxθy1.1/θz17.7
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μF±20% |
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Closed-Loop Step Time |
XYZ160/θxθyθz400
@1Hz，fixed amplitude
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- |
ms±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass |
2.5(Not include cable) |
2.5(Not in clude cable) |
kg±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
