The N91.XYZTR4K is a high-precision platform that can move in six dimensions: X, Y, Z, θx, θy, and θz. With precise algorithms, it can achieve high-precision motion control of six axes. It features a displacement of 3mm/axis in the straight direction, and a deflection stroke of ±2°/axis. Its low profile is suitable for integration. With E53 piezo controller, it can be operated by PC software, which is more convenient.
Characteristics
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技术参数 | ||
Type |
N91.XYZTR4K |
Units |
Active axes |
X、Y、Z、θx、θy、θz |
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Travel in XYZ |
3/axis |
mm |
Travel in θxθyθz |
±2/axis |
° |
XYZ resolution |
<30 |
nm |
θxθyθz resolution |
0.2 |
μrad |
Operating temperature |
0~40 |
℃ |
Material |
Steel, Al |
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Load capacity(horizontal) |
1.2 | kg |
Mass |
2 |
kg±5% |
Cable length |
1.5 |
m±10mm |
Recommended Controllers |
E53.C4K-H/E53.C1K-K |
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