N91.XYZTR4K 6-Axis Motion Piezo Motor StageCurrent Location:Product Homepage >> Piezo actuator/stage>>N91.XYZTR4K 6-Axis Motion Piezo Motor Stage
  • Introduction
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The N91.XYZTR4K is a high-precision platform that can move in six dimensions: X, Y, Z, θx, θy, and θz. With precise algorithms, it can achieve high-precision motion control of six axes. It features a displacement of 3mm/axis in the straight direction, and a deflection stroke of ±2°/axis. Its low profile is suitable for integration. With E53 piezo controller, it can be operated by PC software, which is more convenient.



Characteristics


 Active axes: X, Y, Z, θx, θy, θz

 3mm/axis travel range in XYZ

 ±2°/axis travel range in θxθyθz

 Load capacity(horizontal mounting) to 1.2kg

 Self-locking at rest, requires no current

 UHV version is available

 Recommended ControllersE53.C4K-H/E53.C1K-K


    技术参数

Type

N91.XYZTR4K

Units

Active axes

X、Y、Z、θx、θy、θz

 

Travel in XYZ

3/axis

mm

Travel in θxθyθz

±2/axis

°

XYZ resolution

30

nm

θxθyθz resolution

0.2

μrad

Operating temperature

0~40

Material Steel, Al

Load capacity(horizontal)
1.2 kg

Mass

2

kg±5%

Cable length

1.5

m±10mm

Recommended Controllers

E53.C4K-H/E53.C1K-K


     Drawing (Click on the picture to enlarge it)
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    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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Piezo · Nano · Motion

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