The N91.XYZUR0K five-axis piezo motor stage is a high-precision stage capable of moving in X, Y, Z, θy, and θz. It can achieve a displacement of XY 4mm and Z 2mm and a deflection stroke of ±4° per axis in θy and θz. This motion platform is equipped with the CoreMorrow E53 series small size piezo motor controller, with precision algorithm, to complete the high-precision motion control of five axes.
Characteristics
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Technical Data | ||
Type |
N91.XYZUR0K |
Units |
Active axes |
X、Y、Z、θy、θz |
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Travel in XYZ |
XY4/Z2 | mm |
Travel in θxθz |
±4/axis |
° |
XYZ resolution |
<30 |
nm |
θxθz resolution |
0.2 |
μrad |
Operating temperature |
0~40 |
℃ |
Material |
Steel, Al |
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Load capacity(horizontal) |
1.2 |
kg |
Mass |
0.93 |
kg±5% |
Cable length | 1.5 | m±10mm |
PZT connector | RJ11 |
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Recommended Controllers |
E53.C4K-H/E53.C1K-K |
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