The P33S2T25 macro-micro composite piezo steering stage is composed of the CoreMorrow high-resolution and high-dynamic P33.T2SF piezo tip/tilt platform and a manually adjustable mirror frame. The manual deflection displacement can reach ±6°/axis, and the piezo deflection displacement can reach 3.5mrad/axis. The overall stage can achieve a large angle travel, and a resolution of 0.05μrad, which is suitable for large angle and high-precision applications.
Characteristics
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Technical Data | ||
Type |
P33S2T25 |
Units |
Active axes |
θx、θy |
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Manual adjustment angle |
12 | ° |
Piezo drive |
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Active axes |
θx、θy |
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Drive control |
3 driving channels,
2 sensing channels
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Nominal tilt angle(0~120V) |
2.8/axis(≈578'') |
mrad±10% |
Max.tilt angle(0~150V) |
3.5/axis(≈722'') |
mrad±10% |
Sensor |
SGS |
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Resolution |
0.05(≈0.01'') |
μrad |
Linearity |
θx0.06/θy0.09 |
%F.S. |
Repeatability |
θx0.08/θy0.06 |
%F.S. |
Unloaded resonant frequency |
θx2700/θy4700 |
Hz±20% |
Resonant frequency@36g |
θx1780/θy1850 |
Hz±20% |
Step time |
5@36g |
ms±20% |
El.capacitance |
3.6/axis |
μF±20% |
Cable length |
1.5 |
m±10mm |
Others |
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Material |
Steel, Al |
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Mass(total) |
300(with cable) |
g±5% |
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