Linear Piezo Nanopositioning Stage N81E26XYZ65-BCurrent Location：Product Homepage >> Piezo actuator/stage>>Linear Piezo Nanopositioning Stage N81E26XYZ65-B
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N81E26XYZ65-B is a combined motion platform driven by piezo screws, suitable for mm large stroke position adjustment.  



Characteristics


 Motion in X, Y, Z   

 Travel to ±12.5mm/axis

 Optional vacuum version


Application


 Precise positioning

  Position scanning  

 Optical path adjustment

    Technical Data

Type

N81E26XYZ65-B

Units

Active axes

X, Y, Z


Integrated sensor

Grating sensor


Travel range

±12.5/axis

mm

Max. speed

30

μm/S±10%

Resolution

<30

nm±10%

Load capacity

1.5

kg
Two-way repeatability
 2
 μm
Material
 Steel, aluminum
Operating temperature[1]
 0-40
 ℃
Mass
 1.45
 kg
Cable length
 1.5
 m
Note: UHV version is available.
[1]: custom is available.

    Drawings（Click on the picture to enlarge it）
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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