N31 Three-axis Linear Piezo Motor with SensorCurrent Location：Product Homepage >> Linear piezo motor>>N31 Three-axis Linear Piezo Motor with Sensor
N31 Three-axis Linear Piezo Motor with Sensor
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The N31 series three-axis linear piezo motor can move in XYZ and is equipped with an grating sensor for servo control. It adopts PZT piezo drive and can achieve nanoscale resolution. The stroke for each axis can be selected 25,50,100mm.


Characteristics


 Optional 25,50 or 100mm travel per axis

 Nanoscale resolution

 Load capacity up to 2.5kg

 With grating sensor


Application


 Sample movement of super-resolution imaging

 Micro-nano equipment and manufacturing

 Sample manipulation of scanning electron microscopy (SEM)

 Nano-focusing and scanning

 Active optics

 Integrated circuit manufacturing and testing

 Microscopic and nano-CT

 Large range electron beam direct writing (EBL)

    Technical Data

Type

N31.XY50Z25E

N31.XY50Z100E
 N31.XY100Z25E

Units

Active axes

X、Y、Z

X、Y、Z
 X、Y、Z

Integrated sensor

grating sensor

grating sensor
 grating sensor

Nominal travel range

XY：±25 Z：±12.5

XY：±25 Z：±50
 XY：±50 Z：±12.5
 mm

Max speed

2.5

2.5 2.5
 μm/s±20%

Resolution

80

80
 80
 nm±20%

Bidirectional Repeatability

3

3
 3
 μm±20%

Load capacity

2.5

2.5
 2.5
 kg

Operation temperature

0~40

0~40
 0~40
 ℃

Mass(excluding cable)

4.2

4.7 5.3
 kg±5%

Material

Al、Steel

Al、Steel
 Al、Steel

Cable length

1.5

1.5
 1.5
 m±10mm
    Drawing （Click on the picture to enlarge it）
    Drawing （Click on the picture to enlarge it）
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    Drawing （Click on the picture to enlarge it）
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    Downloads
Auto CAD PDF

N31.XY50Z25E

N31.XY50Z100E

N31.XY100Z25E

Step


Specs Sheet


Manual



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