P72.Z80 Piezo Objective ScannerCurrent Location:Product Homepage >> Piezo Objective Scanner>>P72.Z80 Piezo Objective Scanner
P72.Z80 Piezo Objective Scanner
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Characteristics


 Travel to 80μm

 Load capacity to 0.4kg

 Millisecond response time

 Closed loop for high repeatability

 

 

 

 


Appearance

Moving Part

Match brands/sizes of objectives


Typical Applications


 3D imaging

 Interference/metering

 Surface structure analysis

  Confocal microscope 

 Biotechnology

 Semiconductor test

 


    Technical Data

Type

S-Closed loop

P72.Z80S

P72.Z80K

Units

K-Open loop

  Active axes

Z

Z

 

 Drive control

1 driving channel 1 sensing channel

1 driving channel

 

Nominal travel range(0~120V)

64

64

µm±10%

  Travel range(0~150V)

80

80

µm±10%

  Integrated sensor

SGS

-

 

  Resolution

3

1

nm,typ.

  Closed-loop linearity

0.1

-

%F.S.

  Repeatability

0.05

-

%F.S.

 Push/pull force

160/20

160/20

N

 Stiffness

2

2

N/µm±20%

  Unloaded resonant frequency

700

700

Hz±20%

  Loaded resonant frequency

300@400g

300@400g

Hz±20%

 Unloaded step time

7

2.5

ms±20%

 Closed-loop operating frequency (-3dB)

-

-

Hz±20%

  Load capacity

0.4

0.4

Kg

  El. capacitance

14

14

μF±20%

  Material

Steel

Steel

 

  Mass

360(no cable)

360(no cable)

g±5%

Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.

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