P17.XY200 Piezo Scanners, 187.5µm, Aperture60×60mmCurrent Location：Product Homepage >> XY Piezo Nanopositioner>>P17.XY200 Piezo Scanners, 187.5µm, Aperture60×60mm
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P17 is an XY scanning stage specially developed for applications requiring large aperture and large displacement. The scanner adopts amplification mechanism and built-in high-reliability piezo actuators, which could realize the scanning range of 187.5μm. It has been widely used in the fields of precise positioning and scanning microscopy .


Characteristics


 Max stroke to 187.5μm

 Max load to 1kg

 Aperture：60×60mm

 Closed loop for high Repeatability

  Fast response time

 Available UHV version




Appearance

Moving-part

Amplified-driving

Large Aperture, Large Displacement

P17 is fast and high-precision scanning stage to could realize stroke of 187.5μm/axis. Excellent structural design without friction, high guiding precision, quick response time to 5ms.
Closed-loop version uses high-precision sensing feedback. 60×60mm aperture of the scanner is suitable for wafer positioning or micro-operation in industrial automation.

Freqency VS Load Curve

Application Cases-Wafer Positioning

P17 is used in conjunction with CoreMorrow piezo objective scanner for wafer positioning, the wafer could be driven to perform nano-scale precision positioning of 187.5μm displacement.


Applications


 Image processing and stabilization

 Interference

 Scanning microscopy

 Surface inspection

 Wafer positioning

 Micromanipulation



    Technical data

Models

S-Closed loop

K-Open loop

P17.XY200S

P17.XY200K

Untis

Active axes

X、Y

 

Drive control

2 driving channels 

2 sensing channels

 

Travel range(0~120V)

150/axis

μm±10%

Travel range(0~150V)

187.5/axis

μm±10%

Integrated sensor

SGS/-

 

Aperture

60×60

mm

Closed/open loop resolution

5/1.5

nm

Closed-loop linearity

0.1/-

%F.S

Repeatability

0.05/-

%F.S

Pitch/Yaw/Roll

<15

μrad

Push/pull force capacity

40/15

N

Stiffness

X0.2/Y0.2

N/μm±20%

Unloaded resonant frequency

X240/Y400

Hz±20%

Closed/open-loop unloaded Step time

30/5

ms±20%

Closed-loop operating frequency（-3dB）

25（@28g load）/-

Hz±20%

Load capacity

1

kg

Electrical capacitance

3.6/axis

μF±20%

Material

Steel, Aluminum

 

Mass

660

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual
     3D diagram presentation

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