P17.XY15 piezoelectric scanning stage is an XY-axis translation scanning platform. The center has a aperture size of 25×27.5mm. The product is small in size and stable in performance. P17.XY15 scanning platform is an open-loop version and has excellent dynamics, suitable for dynamic scanning applications.
Characteristics
Travel to 15μm |
Load capacity to 0.2kg |
Aperture size:25×27.5mm |
Sub-nm resolution |
Available UHV version |
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Appearance |
Moving-part |
Amplified-driving |
Large Stiffness, High Resolution N65 adopts direct drive mechanism design and built-in high-performance piezoelectric ceramics. It is based on an open-loop version with ultra-high resolution of 0.2nm. The excellent structural design makes it have a high stiffness of 3N/μm, and the XY axis no-load resonant frequency can reach 1KHz. This product is ideal for high-speed scanning applications. |
Freqency VS Load Curve |
Step Time N65 series piezoelectric scanning stage is equipped with CoreTomorrow's high-power E00/E01 series piezo controller, which can realize a step time of 1.5ms. |
Applications
Microscopic imaging |
Surface inspection |
Interference/metering |
Precision positioning |
Infrared Thermal Imaging |
Semiconductor Testing |
Technical data | |||
Models |
Suffix K-Open loop |
P17.XY15K |
Units |
Active axis |
X、Y |
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Drive control |
2 driving channels |
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Travel range(0~120V) |
12/axis |
μm±10% |
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Travel range(0~150V) |
15/axis |
μm±10% |
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Aperture size |
25×27.5 |
mm |
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Resolution |
0.2 |
nm |
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Pitch/yaw/roll |
<5 |
μrad |
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Push/pull force |
30/3 |
N |
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Stiffness in motion direction |
X3/Y3 |
N/μm±20% |
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Unloaded resonant frequency |
X1000/Y1000 |
Hz±20% |
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Unloaded step time |
1.5 |
ms±20% |
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Load capacity |
0.2 |
kg |
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El.capacitance |
0.7/axis |
μF±20% |
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Material |
Aluminum |
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Mass |
55 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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