P16.XY20 piezo scanner is an XY motion scanning platform, adopting amplification mechanism. It features a center aperture diameter of 26mm and ±8μm displacement in X and Y axes. The product is very compact and easy to integrate.
Features
Travel to ±8μm |
Load capacity to 1kg |
Aperture:Ø26mm |
Closed loop for high accuracy |
Available UHV |
Custom is available |
Moving-part |
Amplified-driving |
High Dynamics, Resolution P16.XY20 is small-volume high-precision translation scanning stage. It moves in X and Y-axis, specially designed for high-resolution, high-dynamic, high-positioning precision applications. It has built-in high-reliability piezoelectric ceramics and can realize XY axis ±8μm displacement, the resolution can reach 0.5nm, and the full-stroke repeatability accuracy is up to nanometer. |
Open/Closed Loop Curve |
Freqency VS Load Curve |
Applications case-Infrared Camera P16.XY20 piezo scanning stage is applied to infrared camera with its high frequency and high resolution, which greatly improves the resolution of the imaging. |
Applications
Microscopic imaging |
Surface inspection |
Image stabilization |
Interference/metering |
Precision positioning |
XY scanning |
Technical data | ||||
Models |
Suffix S-Closed loop |
P16.XY20S |
P16.XY20K |
Units |
Active axis |
X、Y |
X、Y |
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Driving channels |
3 driving channels |
3 driving channels |
|
|
Travel range(0~100V) |
±6.6/axis |
±6.6/axis |
μm±10% |
|
Travel range(0~120V) |
±8/axis |
±8/axis |
μm±10% |
|
Sensor type |
SGS |
- |
|
|
Aperture size |
Ø26 |
Ø26 |
mm |
|
Resolution |
0.5 |
0.2 |
nm |
|
Linearity |
0.3 |
- |
%F.S |
|
Repeatability |
0.1 |
- |
%F.S |
|
Pitch/yaw/roll |
<10 |
<10 |
μrad |
|
Push/pull force |
44/44 |
44/44 |
N |
|
Stiffness in motion direction |
X2.2/Y2.2 |
X2.2/Y2.2 |
N/μm±20% |
|
Unloaded resonant frequency |
X2000/Y2000 |
X2000/Y2000 |
Hz±20% |
|
Unloaded step time |
1.5 |
0.7 |
ms±20% |
|
El.capacitance |
1.6/axis |
1.6/axis |
μF±20% |
|
Material |
Steel, Al |
Steel, Al |
|
|
Mass |
18 |
180 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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