P12A.XZ is XZ axes piezo scanner with aperture in the center of scanner. The internal frictionless flexible hinge guiding mechanism uses finite element simulation to optimize the structure and has high guiding precision and large stiffness, large load and other characteristics, the scanner could be equipped with high-performance sensors for closed feedback, achieving repeatability positioning accuracy of 0.04% of full stroke.
Features
Max stroke to 100μm |
Max load to 0.6kg |
Aperture 45×45mm |
Open loop or closed loop |
Appearance |
Moving-part |
Amplified-driving |
Small Size Large Displacement
P12A.XZ is very compact and can be displaced up to 100μm. Unique parallel kinematic design enables the scanner to achieve high-speed precision motion of XZ axes. |
Freqency VS Load Curve |
High Positioning Accuracy P12A is equipped with high-resolution sensor, which detects the position in real time and feeds back to piezo controller. The controller adjusts the voltage correction displacement through the PID algorithm to achieve high-precision positioning. |
Applications
Scanning microscopy |
Confocal microscopy |
Surface measurement |
Semiconductor test |
P12A series
Technical data | |||
Models |
S-Closed loop K-Open loop |
P12A.XZ100S P12A.XZ100K |
Units |
Active axes |
X、Z |
|
|
Drive control |
2 driving channels 2 sensing channels |
|
|
Travel range(0~120V) |
80/axis |
μm±10% |
|
Travel range(0~150V) |
100/axis |
μm±10% |
|
Integrated sensor |
SGS/- |
|
|
Aperture |
45×45 |
mm |
|
Closed/open loop resolution |
3/1 |
nm |
|
Closed-loop linearity |
0.1/- |
%F.S |
|
Repeatability |
0.05/- |
%F.S |
|
Pitch/Yaw/Roll |
<15 |
μrad |
|
Push/pull force capacity |
25/8 |
N |
|
Stiffness |
X0.3/Z0.25 |
N/μm±20% |
|
Unloaded resonant frequency |
X200/Z150 |
Hz±20% |
|
Closed/open-loop unloaded Step time |
15/0.8 |
ms±20% |
|
Load capacity |
0.6 |
kg |
|
Electrical capacitance |
3.6/axis |
μF±20% |
|
Material |
Steel, Aluminum |
|
|
Mass |
290 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
|
|
|