Characteristics
Travel to ±52.5μm |
Load capacity to 0.5kg |
Closed loop for high repeatability |
|
Optional vacuum version |
Amplified-driving |
Amplified-driving P16.XY piezo scanner is used in optical path adjustment experiment with its large load and high frequency. P16 carrying mirror frame to move precisely in XY axis. |
Technical Data | ||||
Type |
S-Closed loop |
P16.XY80S |
P16.XY80K |
Units |
K-Open loop |
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Active axes |
X、Y |
X、Y |
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|
Driving channels |
3 driving channels |
3 driving channels |
|
|
Travel range |
±33/axis(0~100V) |
±40/axis(0~120V) |
µm±10% |
|
Travel range |
±40/axis(0~120V) |
±52.5/axis(0~150V) |
µm±10% |
|
Sensor |
SGS |
- |
|
|
Aperture size |
Ø43 |
Ø43 |
mm |
|
Resolution |
2.5 |
1 |
nm,typ. |
|
Linearity |
X0.3Y1 |
- |
%F.S. |
|
Repeatability |
X0.1Y0.5 |
- |
%F.S. |
|
Pitch/yaw/roll |
< 10 |
< 10 |
µrad |
|
Push/pull force |
50/15 |
50/15 |
N |
|
Stiffness in motion direction |
1 |
1 |
N/μm±20% |
|
Unloaded step time |
5 |
1.5 |
ms±20% |
|
Unloaded resonant frequency |
700 |
700 |
Hz±20% |
|
Load capacity |
0.5 |
0.5 |
Kg |
|
El. capacitance |
3.6 |
3.6 |
μF/axis±20% |
|
Material |
Steel, Al |
Steel, Al |
|
|
Mass |
470 |
470 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; For high reliability long-term use, the recommended driving voltage is 0~120V.
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