P70 piezo nanopositioning scanner has two versions, XY-motion and Z-motion version. Both versions have four through holes at the four corners, and the hole center distance is 30mm, which is very suitable for the installation of cage structures.
Moving direction |
Applied to Cage Structures |
Applied to Cage Structures |
Technical data | |||
Models |
P70.XY20S (amplified) |
P70.XY20K |
Units |
Active axis |
Z |
Z |
|
Drive control |
3 driving channels |
3 driving channels |
|
Travel range(0~100V) |
±7/axis |
±7/axis |
μm±10% |
Travel range(0~120V) |
±8.5/axis |
±8.5/axis |
μm±10% |
Sensor type |
SGS |
- |
|
Resolution |
0.6 |
0.2 |
nm |
Linearity |
0.3 |
- |
%F.S. |
Repeatability |
0.2 |
- |
%F.S. |
Pitch/yaw/roll |
<10 |
<10 |
μrad |
Load capacity |
300 |
300 |
g |
Response time |
30 |
30 |
ms±20% |
Unloaded resonance |
1.2 |
1.2 |
kHz±20% |
Load resonance |
0.4(53g) |
0.4(53g) |
kHz±20% |
El.capacitance |
0.8/axis |
0.8/axis |
μF±20% |
Mass |
175 |
175 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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