P16.XY15 Piezo Scanner is an XY axis motion scanning platform, mechanism amplification design principle, central aperture size is φ37mm, can achieve ±8μm travel in XY. It is designed specifically for imaging applications. The product is compact, easy to integrate and install.
Features
Travel to ±8μm |
Load capacity to 1kg |
Aperture:Ø37mm |
Closed loop for high accuracy |
Available UHV |
Custom is available |
Moving-part |
Applications
Image stabilization |
Microscopic imaging |
Surface inspection |
Interference/metering |
Precision positioning |
Photoelectric aiming pod |
Technical data | ||||
Models |
Suffix S-Closed loop |
P16.XY15S |
P16.XY15K |
Units |
Active axis |
X、Y |
X、Y |
||
Driving channels |
3 driving channels |
3 driving channels |
|
|
Travel range |
±6.6/axis(0~100V) |
±6.6/axis(0~100V) |
μm±10% |
|
Travel range |
±8/axis(0~120V) |
±8/axis(0~120V) |
μm±10% |
|
Sensor type |
SGS |
- |
|
|
Aperture size |
Ø37 |
Ø37 |
mm |
|
Resolution |
0.5 |
0.2 |
nm |
|
Linearity |
0.3 |
- |
%F.S |
|
Repeatability |
0.1 |
- |
%F.S |
|
Pitch/yaw/roll |
<10 |
<10 |
μrad |
|
Push/pull force |
44/44 |
44/44 |
N |
|
Stiffness in motion direction |
X2.2/Y2.2 |
X2.2/Y2.2 |
N/μm±20% |
|
Unloaded resonant frequency |
X1500/Y1500 |
X1500/Y1500 |
Hz±20% |
|
Unloaded step time |
1.5 |
0.7 |
ms±20% |
|
El.capacitance |
1.6/axis |
1.6/axis |
μF±20% |
|
Material |
Steel, Al |
Steel, Al |
|
|
Mass |
235 |
235 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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