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P16.XY15 Piezo Scanner
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P16.XY15 Piezo Scanner is an XY axis motion scanning platform, mechanism amplification design principle, central aperture size is φ37mm, can achieve ±8μm travel in XY. It is designed specifically for imaging applications. The product is compact, easy to integrate and install.


Features


 Travel to ±8μm

 Load capacity to 1kg

 Aperture:Ø37mm

 Closed loop for high accuracy

 Available UHV

 Custom is available 


Moving-part


Applications


 Image stabilization

 Microscopic imaging

 Surface inspection

 Interference/metering

 Precision positioning

 Photoelectric aiming pod

    Technical data

Models

Suffix S-Closed loop
Suffix K-Open loop

P16.XY15S

P16.XY15K

Units

Active axis

XY

 XY

  Driving channels

3 driving channels
2 sensing channels

3 driving channels
2 sensing channels

 

Travel range

±6.6/axis(0~100V)

±6.6/axis(0~100V)

μm±10%

Travel range

±8/axis(0~120V)

±8/axis(0~120V)

μm±10%

Sensor type

SGS

 -


Aperture size

Ø37

Ø37

mm

Resolution

0.5

0.2

nm

Linearity

0.3

-

%F.S

Repeatability

0.1

-

%F.S

Pitch/yaw/roll

<10

<10

μrad

Push/pull force

44/44

44/44

N

Stiffness in motion direction

X2.2/Y2.2

X2.2/Y2.2

N/μm±20%

Unloaded resonant frequency

X1500/Y1500

X1500/Y1500

Hz±20%

Unloaded step time

1.5

0.7

ms±20%

El.capacitance

1.6/axis

1.6/axis

μF±20%

Material

Steel, Al

 Steel, Al


Mass

235

235

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

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Auto CAD PDF
Step
Specs Sheet
Manual


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