- Introduction
- Feedback
P12.XYZ100-C is an XYZ scanning stage specially developed for applications requiring large aperture. The scanner adopts amplification mechanism and built-in high-reliability piezo actuators, which could realize the scanning range of 110μm/axis. It has been widely used in the fields of precise positioning and scanning microscopy .
Characteristics
|
|
|
|
|
|
Step time 
|
Applications
|
|
|
|
|
|
|
|
|
|
| Technical Data | ||||
|
Type |
S-Closed loop |
P12.XYZ100S-C |
P12.XYZ100K-C
|
Units |
|
K-Open loop |
||||
|
Active axes |
X、Y、Z |
X、Y、Z |
|
|
| Drive control |
3 driving channels
3 sensing channels
|
3 driving channels |
|
|
|
Nominal travel range(0~120V) |
90/axis |
90/axis |
µm±10% |
|
|
Max.travel range(0~150V) |
110/axis |
110/axis |
µm±10% |
|
|
Sensor type |
SGS |
- |
|
|
|
Aperture |
Ø100 |
Ø100 |
mm |
|
|
Resolution |
4 |
1.5 |
nm |
|
|
Linearity |
X0.24/Y0.29/Z0.30 |
X0.24/Y0.29/Z0.30 |
%F.S. |
|
|
Repeatability |
X0.05/Y0.12/Z0.09 |
X0.05/Y0.12/Z0.09 |
%F.S. |
|
|
Pitch/yaw/roll |
<20 |
<20 |
µrad |
|
|
Push/pull force capacity |
20/4 |
20/4 |
N |
|
|
Stiffness |
0.3 |
0.3 |
N/µm±20% |
|
|
Unloaded resonant frequency |
XY215/Z145 |
XY215/Z145 |
Hz±20% |
|
| Resonant frequency@1kg |
XY65/Z60 |
XY65/Z60 |
Hz±20% | |
|
Step time |
100@1kg |
30 |
ms±20% |
|
|
Load capacity |
Horizontal |
1 |
1 |
Kg |
|
Vertical |
0.1 | 0.1 | ||
|
Inverted |
0.4 | 0.4 | ||
|
El. capacitance |
6.4/axis |
6.4/axis |
μF±20% |
|
|
Operating temperature |
-20~65 |
-20~65 |
°C |
|
|
Material |
Steel, Al |
Steel, Al |
|
|
|
Mass |
900 |
900 |
g±5% |
|
|
Cable length |
1.5 |
1.5 |
m±10mm |
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
