P12.XYZ100 is XY-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Characteristics
XYZ axes |
Max stroke to 100μm |
Max load to 0.6kg |
With Ø25 or Ø35 aperture |
Appearance |
P12.X-D3 moving part |
Amplified-driving |
1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve |
Application case-Inverted Piezo Scanner |
Custom Version |
Custom Version |
Applications
Scanning interference |
Confocal microscopy |
Wafer positioning |
Surface measurement |
Image processing and stabilization |
Optical capture |
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Technical data | ||||
Models |
S-Closed loop K-Open loop |
P12.XYZ100S P12.XYZ100K |
Units |
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Active axes |
XYZ |
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Drive control |
3 driving channels 3 sensing channels |
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Travel range(0~120V) |
80/axis |
μm±10% |
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Travel range(0~150V) |
100/axis |
μm±10% |
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Integrated sensor |
SGS/- |
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Aperture |
Ø25/Ø35 |
mm |
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Closed/open loop resolution |
3/1 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S |
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Repeatability |
0.05/- |
%F.S |
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Pitch/Yaw/Roll |
<15 |
μrad |
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Push/pull force capacity |
20/4 |
N |
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Stiffness |
X0.3/Y0.25/Z0.2 |
N/μm±20% |
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Unloaded resonant frequency |
X230/Y180/Z150 |
Hz±20% |
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Closed/open-loop unloaded Step time |
30/0.8 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
- |
Hz±20% |
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Load capacity |
0.6 |
kg |
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Electrical capacitance |
1.8/axis |
μF±20% |
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Material |
Steel, Aluminum |
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Mass |
260 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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