Characteristics
XYZ motion |
100μm/axis travel |
Aperture: Ø10mm |
Suitable for vacuum application |
Technical Data | |||
Type |
P12B.XYZ100S |
P12B.XYZ100K |
Units |
Active axes |
X、Y、Z |
X、Y、Z |
|
Drive control |
3 driving channels
3 sensing channels |
3 driving channels |
|
Travel range(0~150V) |
100/axis |
100/axis |
μm±20% |
Sensor |
SGS |
- |
|
Resolution |
3 |
1 |
nm |
Aperture |
Ø10 |
Ø10 |
mm |
El. capacitance |
3.6/axis |
3.6/axis |
μF±10% |
Unloaded resonant frequency |
0.03 |
0.03 |
kHz±20% |
Load capacity |
200 |
200 |
g |
Mass |
250 |
250 |
g±5% |
Material |
Steel, Aluminum |
Steel, Aluminum |
|
Note: Above are measured using E00/E01piezo controller. The maximum driving voltage can be -20V~150V; Recommended 0~120V for high-reliability and long-term use.
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