XD107 piezo scanner moves in XYZ, it has a large square aperture, and is ideal for sample microscopy imaging applications.
Characteristics
XYZ motion |
Travel up to 100μm |
Load capacity to 0.4kg |
Aperture of 50×50mm |
Application
Scanning microscopy |
Mask/wafer positioning |
Interferometry |
Metrology |
Micromanipulation, etc. |
Biotechnology |
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Technical Data | |||
Type |
XD107.XY100Z80S |
XD107.XY100Z80K |
Units |
Active axes |
X Y Z |
X Y Z |
|
Drive control |
3 driving channels |
3 driving channels |
|
Travel range(0~120V) |
XY80/Z64 |
XY80/Z64 |
μm±10% |
Travel(0~150V) |
XY100/Z80 |
XY100/Z80 |
μm±10% |
Sensor |
SGS |
- |
|
Aperture |
50×50 |
50×50 |
mm |
Size |
94×94×24.5 |
94×94×24.5 |
mm |
Resolution |
3 |
1 |
nm |
Linearity |
XY0.2/Z0.1 |
- |
%F.S. |
Repeatability
|
XY0.02/Z0.02 |
- |
%F.S. |
Pitch/yaw/roll |
≤ 30 |
≤ 30 |
μrad |
Unloaded resonant frequency |
XY220/Z160 |
XY220/Z160 |
Hz±20% |
Resonant frequency @500g |
XY110/Z80 |
XY110/Z80 |
Hz±20% |
El. capacitance |
XY3.6/Z1.8 |
XY3.6/Z1.8 |
μF±20% |
Load capacity |
0.4 |
0.4 |
kg |
Material |
Al, Steel |
Al, Steel |
|
Mass |
420 |
420 |
g±5% |
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