Space disturbance simulation: Space microdisturbance environment simulation is a key test item to ensure the reliability of spaceborne equipment in the process of spacecraft ground verification. The high-load tip/tilt platform based on piezo drive technology can accurately reproduce complex disturbance conditions such as micro-vibration and random deflection in space through the multi-degree-of-freedom nanoscale dynamic response characteristics. By carrying the tested components for dynamic response testing, researchers can not only effectively verify the disturbance suppression ability of the attitude stabilization system and the optical path control unit, but also optimize the control parameter configuration through closed-loop feedback, thereby improving the optical pointing accuracy to the level of sub-micro radians, providing core technical support for the ground reliability verification of deep space exploration equipment.

Semiconductor wafer processing inspection: With the iteration of semiconductor manufacturing to large size wafers of 300mm and above, gravity deformation caused by wafer self-weight and dynamic processing vibration interference have become the key bottlenecks restricting process accuracy. Based on the high-rigidity piezoelectric drive architecture, the high-load tip/tilt platform can achieve large load capacity while maintaining the precision of nanoscale repeatability and nanoarc tilt accuracy. Through the nanoscale multi-axis cooperative motion of the piezo tip/tilt platform, key processes such as lithographic alignment, defect scanning and 3D topography detection of large-size wafers can be accurately executed. With the active vibration suppression algorithm, the interference of machining vibration on detection accuracy can be effectively suppressed, which providing basic technical support for improving the yield of advanced process semiconductor devices.

Ultra-high resolution microscopic imaging: In the field of single molecule observation in life science and atomic characterization in materials science, piezoelectric driven nano-positioning system successfully solves the inherent contradiction between the multi-modal observation requirements and motion accuracy of traditional microscopic platforms through the collaborative control of θx/θy high-precision tilt and Z-axis adaptive focusing. Based on the nanoarc tilt resolution, millisecond positioning stability time, and closed-loop control, the platform can achieve real-time tracking accuracy of nanoscale level in the dynamic observation of living cells, enabling confocal microscopy and super-resolution imaging system (STED/PALM) to break the optical diffraction limit. It provides atomic-scale observation guarantee for the study of suborganelle interaction and interface analysis of new nanomaterials.