Multi-Axes High Precision Positioning | H64A.XYZTR2S/K-C Piezo Tip/tilt Platform
When the exploration of science and technology goes deep into the microscopic world, more and more scientific fields have the ultimate demand for precision positioning, such as laser processing to ensure the stable focusing of light beams at the nanoscale, accurate wafer alignment in semiconductor detection, and super-resolution microscopic imaging in biomedicine. These applications all share the same core requirements - precision motion with multiple axes, high precision and fast response. H64A.XYZTR2S/K-C hexapod is a high-precision piezo tip/tilt platform, which uses piezo drive technology to provide nanoscale precision motion solutions for optics, semiconductors, biomedicine, micro-nano manufacturing and other fields.
H64A.XYZTR2S/K-C piezo tip/tilt platform
H64A.XYZTR2S/K-C is a X, Y, Z, θx, θy, θz 6 axes piezo positioning platform, which can produce ultra-precise 6-axis motion, suitable for static positioning and dynamic attitude adjustment. The positioning platform is designed with parallel mechanism inside, which can achieve better dynamic performance. Its built-in high-performance piezo ceramics can achieve linear displacement of X±9/Y±9.5/Z155μm and tilt angle of θxθy±1.1/θz±1mrad. The closed-loop version of the full bridge design avoids temperature drift and ensures nanoscale positioning accuracy.
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Characteristics
X, Y, Z, θx, θy, θz 6-axes motion
Linear stroke: X±9/Y±9.5/Z155μm
Tilt angle: θxθy ±1.1/θz ±1mrad
High closed-loop positioning accuracy
Capacity up to 12kg
The internal parallel mechanism can achieve better dynamic performance
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Application
1. Wafer Attitude Adjustment：The wafer can be adjusted to the correct position through the precise positioning of each dimension of the piezo tip/tilt stage to meet various process operations on the wafer, widely used in wafer processing, wafer detection and lithography technology, and plays a vital role in the application, which has a direct impact on the manufacturing quality and performance of the chip.
Note: Image from online resources
2. Simulation of Space Disturbance：Space disturbance simulation is used to simulate space disturbance phenomena in physical systems. It can be used to study phenomena in fluid mechanics, thermodynamics, electromagnetism and other fields, such as turbulence, heat convection, electromagnetic wave propagation and so on. The piezo tip/tilt rotation stage can simulate small disturbances in space, such as small vibration, small rotation, etc., in order to test and verify the attitude of components and the performance of the control system.
Note: Image from online resources
Note: Image from online resources
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Technical Data
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Model |
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Active axis |
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Drive control |
6 driving channels, 6 sensing channels; 6driving channels |
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XYZ nominal travel range(0~120V) |
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XYZ travel range(0~150V) |
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θxθyθz nominal travel range(0~120V) |
θxθy±0.9mrad(≈±186min)/θz±0.8mrad(≈±165min) |
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θxθyθz travel range(0~150V) |
θxθy±1.1mrad(≈±227min)/θz±1mrad(≈±206min) |
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Sensor |
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Closed/open-loop linear resolution |
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Closed/open-loop angular resolution |
θxθy0.08μrad/θz0.07μrad(≈0.015min); 0.025μrad(＜0.01min) |
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Closed-loop repeatability |
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Unloaded resonant frequency |
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Resonant frequency@10kg |
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Load capacity |
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El. capacitance |
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Closed-loop step time |
40ms@1Hz , 1/10 amplitude |
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Material |
Steel, Aluminum |
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Mass |
6.45kg (Not including cable) |
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Connector |
DB15 Male ×1 + DB15 Female ×1 |
Recommend Controller
E00.D6K04 chassis piezo controller is suitable for driving H64A.XYZTR2S/K-C. This controller has 6 output channels, output voltage ranges 0~150V, bandwidth up to 10kHz, which can be controlled by analog or digital signals and RS-422 serial port for communication with the host computer.
For more details, please contact us by sending email to info@coremorrow.com, or adding wechat ID: 17051647888.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
