P66.X5K Ultra-High Resolution 1-Axis Piezo Nano-positioning Stage
Ultra-High Resolution 1-Axis Piezoelectric Nano-positioning Stage
The ultra-high resolution piezoelectric nano-positioning stage, with its outstanding performance of high precision, fast response and high stability, leads technological innovations in numerous industries, bringing unprecedented possibilities to scientific research and industrial production. It plays an irreplaceable role in exploring the mysteries of the microscopic world in basic scientific research and enhancing product quality and performance in high-end manufacturing.
P66.X5K piezoelectric nano-positioning stage adopts piezoelectric ceramic direct drive technology, capable of generating 1-axis motion in X, with travel range of 4.7 μm and open-loop resolution of 0.2 nm. It can precisely capture atomic-level displacement changes. It can carry 2 kg when installed horizontally, and remains stable and reliable when installed vertically or inverted, balancing the precision of minute displacements with the stability of large loads. Compact in size and structure, it measures only 85×70×15.5 mm³, making it an ideal choice for space-constrained scenarios. The product is shown in the following figure.
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1.1-Axis X Motion
2.Travel to 4.7μm
Open-loop Displacement Curve
3.Load Capacity 2kg
4.Optional Mounting Direction
Horizontal mount
Vertical mount
Inverted mount
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1.Semiconductor manufacturing：In the process of semiconductor chip manufacturing, the requirements for positioning accuracy in the photolithography are extremely strict. The piezo nano-positioning stage can be used to precisely control the relative position of the wafer and the mask plate, ensuring the precise transfer of the lithography pattern. By taking advantage of the ultra-high precision of the piezo nano-positioning stage, the yield rate of chip manufacturing can be effectively improved, which promoting the development of semiconductor manufacturing processes towards smaller processes and higher integration.
Note: Image from online resources
2.Microscopy/Scanning：
Note: Image from online resources
3.Optical measurement：Optical measurement is a non-contact measurement technology that utilizes the properties of light, such as its propagation, reflection, refraction, interference, and diffraction, to precisely measure length, shape, angle, color, etc. The piezo nano-positioning stage, with its high precision and rapid response, provides nanoscale precise positioning in optical measurement technology, enabling more accurate measurement results.
Note: Image from online resources
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Model
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Active Axis |
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Drive Control |
1 channel driving |
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Nominal travel range（0~120V） |
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Max. travel range（0~150V） |
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Open loop resolution |
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Unloaded resonant frequency |
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Resonant frequency with load |
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Step time |
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El.capacitance |
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Working temperature |
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Load capacity |
Horizontal |
2kg |
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Vertical |
1.5kg | |
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inverted |
2kg | |
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Material |
Steel, aluminium |
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Cable length |
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Mass |
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Recommend Controller
E01.C1 piezo controller is ideal for driving the P66.X5K piezo nano-positioning stage. It is a chassis-type piezo ceramic controller. The output voltage range is -20V to 120V, with a bandwidth of 10kHz. It can be manually adjusted, with analog input and self-waveform control. It is equipped with a computer serial port /USB interface and a liquid crystal keyboard display, making operation convenient.
For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
