S51.ZT1S150 Piezo Tip/Tilt Stage – 150mm×150mm Large Aperture, Large Load
In applications such as precision optical systems, advanced microscopic imaging, and semiconductor detection, high-precision and multi-axis dynamic adjustment of the beam or sample platform is a key technical requirement. Even the slightest deviation in the alignment of the optical path or the slightest shift in the sample position may lead to errors or even the failure of the experiment. Therefore, high-precision attitude adjustment capability has become the core demand in these fields.
Based on the mature technology of the existing S51 large-load piezo tip/tilt stage, we have developed a new type of S51.ZT1S150 piezo tip/tilt stage. This new product has been specifically designed and balanced in key indicators such as light transmission aperture, motion stroke and load capacity. While meeting the medium light transmission requirements, it also takes into account large load and multi-axis motion capabilities, providing reliable support for more complex application scenarios.
01
Piezo Tip/Tilt Stage: A Powerful Tool in the Field of Precise Posture Adjustment
The piezo tip/tilt stage has become a core product in high-end precision equipment, which is inseparable from its several prominent technical features:
1. Flexible Hinge Guiding Structure: No friction, no gap, no backlash, ensuring long-term operation stability and repeat positioning accuracy;
2. High Resolution: The linear motion resolution can be nanometer level, and the deflection resolution can be sub-microarc level, meeting the requirements of precise attitude adjustment;
3. Quick Response:The step response time can be short to millisecond, enabling rapid posture adjustment and meeting the requirements of high-speed scanning and dynamic tracking;
4. Low Power Consumption and Compact Design: Low power consumption, no electromagnetic radiation, and compact structure facilitate integration into various optical systems with limited space;
5. High Stiffness and Maintenance-Free: It can operate stably for a long time under complex working conditions, providing core support for various high-demand and precise attitude adjustment scenarios.
S51.ZT1S150 Large-Load Piezo Tip/Tilt Stage
02
The Core Advantages of the New Product S51.ZT1S150
As a new model of the S51 series, the S51.ZT1S150 not only inherits its original advantages but also achieves precise breakthroughs in key parameters.
1.
In optical applications, the size of the aperture directly determines the compatibility of the optical path. If it is too small, it cannot be adapted to large-aperture optical components; if it is too large, it may cause equipment redundancy. The 150mm×150mm hole specification design of S51.ZT1S150 precisely fills the size gap of the original S51 series. Whether it is for installing medium-sized optical lenses, scanning large-area samples, or meeting the light transmission requirements when combining multiple beams, the S51.ZT1S150 can achieve more precise adaptation, significantly enhancing the adaptability flexibility of the equipment.
2. Multi-Axis Precise Posture Control, Z-Axis Large Stroke
S51.ZT1S150 tilts in both θx and θy , with an angle of up to ±0.9mrad, meeting the adjustment requirements of most precise scenarios. It is also equipped with a Z-axis motion, with a travel range of up to 200μm, which can more precisely adapt to scenarios such as nano-focusing and multi-layer sample detection that require large stroke Z-axis adjustment.
3.
The large load capacity of the S51 piezo tip/tilt stage is widely recognized by the market. The S51.ZT1S150 continues this core gene and can bear a maximum load of 1.5kg. Whether equipped with heavy optical components, mask assemblies, or large-area sample stages, the S51.ZT1S150 can operate stably without worrying about positioning drift or stage deformation caused by insufficient load. It can meet the complex working conditions of medium or medium-load scenarios.
03
Diverse Application Scenarios: Covering the Precise Posture Adjustment Needs of Multiple Industries
With its comprehensive performance advantages, S51.ZT1S150 can be widely applied in multiple high-precision and cutting-edge fields:
1.High-precision Laser Processing: In scenarios such as laser cutting and laser welding, S51.ZT1S150 can achieve precise pointing and fine-tuning of the laser beam. When combined with large-diameter apertures, it is compatible with medium-diameter lasers, enhancing processing accuracy and efficiency.
2.Micro-nano Manufacturing and Semiconductors: It is used for fine-tuning the position of medium-sized masks or wafers to ensure alignment accuracy and help improve chip yield.
3.Aerospace:It can be used in space disturbance simulation systems, providing micro-angle excitation and assisting in the verification of vibration suppression algorithms.
4.Scientific Research and Biotechnology: In scanning microscopic scenes, precise tilt and Z-axis adjustment capabilities enable all-round fine scanning of samples. The Z-motion of 200μm can adapt to the nano-focusing requirements at different depths, providing stable support for biotechnology research such as super-resolution imaging and fine cell manipulation.
5.Calibration of Metrological Testing Equipment: In the calibration scenarios of interferometers, metrology instruments and other devices, the high stability and nanometer-level positioning capability of S51.ZT1S150 can help improve calibration accuracy and data reliability.
Measured Curves
Voltage vs. Travel Curve
Repeatability Curve
Linearity Curve
Technical Data
|
Model |
S51.ZT1S/K150 |
|
Active axes
|
θx, θy, Z |
|
Drive Control |
3 driving channels, 3 sensing channels/3 driving channels |
|
Nominal travel in θx, θy (0~120V) |
1.4mrad/±0.7mrad (≈±144″) |
|
Max. travel in θx, θy (0~150V) |
1.8mrad/±0.9mrad (≈±186″) |
|
Nominal travel in Z (0~120V) |
160μm |
|
Max. travel in Z (0~150V) |
200μm |
|
Sensor Type |
SGS/- |
|
Aperture size |
150mm×150mm |
|
Closed/Open-loop resolution in θx θy |
0.25μrad (≈0.05″)/0.08μrad (≈0.02″) |
|
Closed/Open-loop linear resolution in Z |
7nm/0.5nm |
|
Closed-loop linearity |
θx0.03%F.S.\θy0.02%F.S.\Z0.01%F.S./- |
|
Closed-loop repeatability |
θx0.03%F.S.\θy0.01%F.S.\Z0.01%F.S./- |
|
Unloaded resonant frequency |
150Hz |
|
Loaded resonant frequency |
87Hz@750g |
|
Closed/Open-loop step time |
100ms@750g/35ms |
|
El.capacitance |
3.6μF/axis |
|
Load capacity |
1.5kg |
|
Material |
Al, Steel |
|
Mass |
1230g |
Recommended Controller
E70.D3S-L is a three-channel piezo controller based on the standard E70 piezo controller with communication interface transformation. It can perform digital communication through serial port, USB or network port, and is suitable for driving the S51, ZT1S150 series piezo tip/tilt stage. The E70.D3S-L controller is powered by DC24V and can perform closed-loop control through analog or digital signals. The upper computer software supports secondary development.
For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
