
With the rapid iteration of precision manufacturing and cutting-edge scientific research, the demand for precise angle positioning has become increasingly strict. It is necessary to have positioning accuracy at the nanometer level, adapt to the requirements of extreme working conditions, and also meet the personalized operation requirements of specific scenarios. Against this backdrop, CoreMorrow S20A.R2S 1-axis θz non-magnetic piezo rotation stage, as a new core member of the S20A series, is precisely developed based on the demands of specific scenarios. It provides efficient and stable precision angle adjustment solutions for fields such as semiconductor manufacturing, precision optics, and quantum research.
I
Core Feature of the Product
S20A.R2S piezo rotation stage continues the mature accumulation of non-magnetic piezoelectric positioning technology and combines the application characteristics of unidirectional angle adjustment. It has targeted advantages in terms of stroke, load capacity, accuracy and environmental adaptability.
01
1-axis θz Non-Magnetic Structure, Eliminating Magnetic Field Interference
S20A.R2S adopts θz unidirectional rotation design. Its internal structure and key materials have all undergone special non-magnetic treatment, eliminating the problem of magnetic interference from the root. This design enables it to be directly applied to magnetic field-sensitive scenarios such as electron beam processing and quantum experiments.
02
2mrad Unidirectional Stroke Meets the Demand for Large-Angle Adjustment
S20A.R2S can achieve a maximum unidirectional rotation angle of 2mrad. As an important expansion of the S20A series, its unidirectional stroke precisely complements the ±0.7mrad bidirectional stroke of the S20A.R1S-C1W, providing a greater operational space for scenarios such as unidirectional angle compensation and fixed attitude setting.
03
3kg High Load Capacity, Suitable for More Scenarios
In terms of structural design, S20A.R2S has been optimized and upgraded, with a rated load capacity of 3kg, capable of stably carrying heavy-duty optical lenses, wafer inspection fixtures, precision probe cards and other workpieces. Higher load-bearing capacity reduces the cost of using multiple devices in combination and also saves installation space for the equipment.
04
Nanometer-Level Precision Ensures Positioning Consistency
The linearity and repeatability of S20A.R2S also perform exceptionally well, and it can maintain nanometer-level positioning stability and consistency for a long time. Whether it is long-term precise detection or high-frequency angle setting, it can accurately output the preset angle, providing reliable positioning guarantee for high-precision processing and scientific research experiments.
05
Composite Material Design, Taking Both Rigidity and Lightweight into Account
The entire structure is designed with a composite material of stainless steel and aluminum alloy, which not only ensures the structural rigidity and wear resistance of the equipment but also guarantees its operational stability under high loads. It can also achieve product lightweighting, making the installation and integration of equipment more flexible and convenient.
Technical Specifications
|
Model |
S20A.R2S/K |
|
Active Axis |
θz |
|
Drive Control |
1-channel drive, 1-channel sensing / 1-channel driving |
|
Standard Rotation Angle(0~120V) |
1.6mrad (≈330″) |
|
Max. Rotation Angle(0~150V) |
2mrad (≈413″) |
|
Sensor |
SGS / - |
|
Resolution |
0.04μrad (≈0.01″) |
|
Linearity |
0.008% F.S. |
|
Repeatability |
0.01% F.S. |
|
Unloaded Resonance Frequency |
1550 Hz |
|
Loaded Resonant Frequency |
380Hz@3kg |
|
Closed/Open Loop Unloaded Step Time |
30ms@3kg/10ms |
|
EI.capacitance |
19μF |
|
Load Capacity |
3kg |
|
Material |
Stainless Steel, Al |
|
Mass |
1520g |
II
Application Scenarios
With its efficient and precise performance design, S20A.R2S piezo rotation stage can be widely applied in the precise positioning scenarios of multiple high-end fields, providing stable support for various core processes.
1.Semiconductor Manufacturing
Wafer inspection achieves precise alignment and positioning of wafers and mask plates, as well as micro-angle adjustment of chip bonding probe cards, etc.;
2.Precision Optics
Optical path adjustment in vacuum environment, angle setting of optical components for laser processing, deflection and stabilization of laser beams, etc.;
3.Bioengineering
It provides ultra-high-precision rotation and manipulation of samples under a microscope in a non-magnetic environment, as well as positioning of medical precision instruments, etc.;
4.Precision Measurement and Inspection
Unidirectional angle calibration of interferometers and measuring instruments, and dimensional detection and positioning of heavy precision workpieces.
(Note: Image from the Internet)
Customized Services: Tailored to Every Exclusive Need
S20A.R2S piezo rotation stage supports personalized development based on the actual application scenarios of customers. Whether it is fine-tuning the stroke range, customizing the installation interface, or adapting the control method, CoreMorrow will provide you with full-process services from requirement communication to solution implementation to ensure that the product is perfectly matched with the working conditions.
For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.

