- Introduction
- Feedback
Characteristics
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 Deflection travel up to 2.5mrad/axis, resolution up to 0.2μrad
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Recommended controller  E00.D5K01
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| Technical Data | ||||
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Type |
S-Closed loop
K-Open loop |
H40.XYT2S
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H40.XYT2K
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Units |
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Active axes |
X、Y、θx、θy |
X、Y、θx、θy |
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Drive control |
5 driving channels |
5 driving channels |
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| Nominal linear travel range(0~120V) | 26 | 26 |
μm±10% |
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Max. linear travel range(0~150V) |
33 | 33 |
μm±10% |
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Nominal tilt angle(0~120V) |
±1（≈±206''） |
±1（≈±206''） |
mrad±10% |
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Max. tilt angle(0~150V) |
±1.25（≈±257''） |
±1.25（≈±257''） |
mrad±10% |
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Integrated sensor |
SGS |
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| Resolution in XY | 12 | 4 | nm | |
| Resolution in θxθy |
0.5（≈0.1''） |
0.2（≈0.04''） |
μrad |
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Linearity in XY |
X0.22/Y0.05 |
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%F.S. |
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Linearity in θxθy |
θx0.2/θy0.28 |
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%F.S. |
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Repeatability in XY |
X0.1/Y0.06 |
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%F.S. |
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Repeatability in θxθy |
θx0.06/θy0.07 |
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%F.S. |
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Unloaded resonant frequency |
X525/Y629/θx5744/θy4064 |
X525/Y629/θx5744/θy4064 |
Hz±20% |
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Resonant frequency@5kg |
X215/Y230/θx41/θy40 |
X215/Y230/θx41/θy40 |
Hz±20% |
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| Step time |
XY50/θxθy150@5kg、1Hz |
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ms±10% |
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El.capacitance |
XY3.8/θxθy3.6 |
XY3.8/θxθy3.6 |
μF±10% |
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| Load capacity | Horizontal | 5 | 5 | kg |
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Material |
Ti, Aluminum, Steel |
Ti, Aluminum, Steel |
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Mass (not include cable) |
950 |
950 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
