S23.ZT0S/K25 is small-sized piezo Z/tip/tilt platform with a volume of Ø49×34mm that allows deflection in θx, θy and motion in Z-axis, it can achieve a deflection travel of ±0.5mrad/axis in θx and θy, and a linear travel of 20.5μm in Z. The open-loop version features extremely high resolution and sub-millisecond response speed. The device is equipped with a aperture of Ø25.4mm, making it suitable for light-transmitting applications such as light filtering.
Characteristics
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Applications
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Recommended Controller ![]() |
Technical Data | ||||
Type |
S-Closed loop
K-Open loop |
S23.ZT0S25
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S23.ZT0K25
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Units |
Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
3 driving channels |
3 driving channels |
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Nominal travel in Z(0~120V) | 16.5 | 16.5 |
μm±10% |
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Max.travel in Z(0~150V) |
20.5 | 20.5 |
μm±10% |
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Nominal tilt angle(0~120V) |
±0.4/axis(≈±82'') |
±0.4/axis(≈±82'') |
mrad±10% |
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Max. tilt angle(0~150V) |
±0.5/axis(≈±103'') |
±0.5/axis(≈±103'') |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Aperture |
Ø25.4 |
Ø25.4 |
mm | |
Resolution in Z | 1 | 0.5 | nm | |
Resolution in θx θy |
0.03(<0.01'') |
0.01(<0.01'') |
μrad |
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Linearity |
θx0.05/θy0.12/Z0.2 |
- |
%F.S. |
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Repeatability |
θx0.03/θy0.06/Z0.17 |
- |
%F.S. |
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Unloaded resonant frequency |
4.2 |
4.2 |
kHz±20% |
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Resonant frequency@50g |
θxθy3.7/Z2.3 |
θxθy3.7/Z2.3 |
kHz±20% |
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Load capacity | 50 | 50 | g | |
El.capacitance | 2/axis |
2/axis |
μF±20% |
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Step time |
10@50g |
4 |
ms±20% |
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Material |
Stainless steel |
Stainless steel |
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Cable length | 1.5 | 1.5 | m±0mm | |
Mass(not include cable) |
250 |
250 |
g±5% |
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