- Introduction
- Feedback
S52A.ZT4S/K piezo tip/tilt and Z stage can tilts in θx, θy and moves in Z. Its max load capacity is up to 3.2kg, the closed-loop repeatability in Z is up to 0.02%F.S., it is very suitable to use in high precision application field. This product adopts a flexible hinge mechanism, which has the advantages of no mechanical friction, fast response speed, high repeatability positioning accuracy, high flexibility and easy operation. This product can also be customized according to needs.
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Step time 
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Characteristics
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 Deflection travel up to ±2.15mrad/axis, resolution up to 0.1μrad
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| Technical data | |||
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Type |
S52A.ZT4S |
S52A.ZT4K |
Units |
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Active axes |
θx、θy、Z |
θx、θy、Z |
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Drive control |
4 driving channels
3 sensing channels
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4 driving channels |
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Nominal travel in Z(0~120V) |
235 |
235 |
μm±10% |
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Max.travel in Z(0~150V) |
295 |
295 |
μm±10% |
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Nominal travel in θxθy (0~120V) |
±1.7/axis（≈±351''） |
±1.7/axis（≈±351''） |
mrad±10% |
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Max.travel in θxθy(0~150V) |
±2.15/axis（≈±443''） |
±2.15/axis（≈±443''） |
mrad±10% |
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Sensor type |
SGS |
- |
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Resolution in Z |
10 |
3.5 |
nm |
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Resolution in θx θy |
0.2（≈0.04''） |
0.1（≈0.02''） |
μrad |
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Linearity |
θx0.13/θy0.14/Z0.13 |
- |
%F.S. |
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Repeatability |
θxθy0.04/Z0.02 |
- |
%F.S. |
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Unloaded resonant frequency |
θxθy230/Z190 |
θxθy230/Z190 |
Hz±20% |
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Loaded resonant frequency@3.2kg |
θxθy60/Z87 |
θxθy60/Z87 |
Hz±20% |
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Load capacity |
3.2 |
3.2 |
kg |
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El. Capacitance |
θxθy20/Z34 |
θxθy20/Z34 |
μF±20% |
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Step Time |
100@3.2kg，1Hz |
40 |
ms±20% |
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Mass |
2.3 |
2.3 |
kg±5% |
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Material |
Stainless steel, Al |
Stainless steel, Al |
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Cable length |
1.5 | 1.5 |
m±10mm |
Note: Above parameters are measured with the E70.D4S-L piezo controller. The maximum driving voltage can be -20V~150V;
For high-reliability and long-term use, the recommended driving voltage is 0~120V.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
