P60.X200C-A High-Precision Capacitive Piezo Nano-Positioning Stage

The driving core of the P60.X200C-A piezo nano-positioning stage is based on the inverse piezoelectric effect of piezo ceramics. By precisely controlling the voltage, the piezoelectric material undergoes a small but precisely controllable deformation, directly converting electrical energy into mechanical energy, thereby achieving displacement output. Then, through FEA modeling and analysis of the designed flexible mechanical structure, the displacement generated by the piezoelectric material is precisely amplified and output. This principle endows the piezo nano-positioning stage with a series of key characteristics:

Piezoelectric ceramics are directly coupled with mechanical structures without intermediate transmission structures, eliminating backlash errors and mechanical wear, providing a fundamental guarantee for nanometer-level positioning;

Piezoelectric ceramics have an extremely high displacement sensitivity, and even a slight change in the driving voltage can trigger the material's stretching response. Combined with a precise drive circuit, it can achieve the minimum bit shift step at the nanometer level.

The response time of piezoelectric ceramics can be a millisecond, enabling high-speed scanning and dynamic positioning, far exceeding the response speed of traditional motor drives.

The piezo ceramic material itself has excellent stiffness. Combined with the integrated flexible hinge structure design, the piezo positioning stage has strong anti-vibration and anti-shock capabilities, and the motion displacement output is precisely controllable.

In the world of positioning at the nanoscale, precision is a very important dimension. The pursuit of precision is an endless journey, and every arrival serves as a benchmark for the next starting point. The P60.X200C-A adopts closed-loop control with capacitive sensors. Its core advantage lies in the precise combination of the high-precision and non-contact measurement characteristics of capacitive displacement sensors and the high-precision motion control of piezo driving. Its closed-loop control achieves high-precision and high-stability positioning by collecting the displacement signals of capacitive sensors in real time and feedback regulating the driving voltage.

The closed-loop of the capacitor CAP is like installing a scale of the nano-world on the system. It fundamentally resolves the errors that may be caused by the hysteresis and creep of piezo materials by non-contact and direct measurement of the minute displacement of motion and real-time feedback of the fluctuation value.

1. High Dynamic Response:

2. Excellent Linearity and Repeatability:

1. Optical Precision Measurement: High-precision piezo nano-positioning stages are widely used in the field of optical measurement, such as white light interference technology. The positioning stage drives the interference lens or sample to perform nano-step scanning in the vertical direction to capture a series of interference images and reconstruct the surface topography. P60.X200C-A, with its high speed uniformity, high rigidity and fast closed-loop response, provides strong support for white light interferometers to achieve nanometer vertical resolution and high accuracy.